Dr. Anthony Yen

Vice President
ASML
BSEE 1985

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“A solid engineering education at Purdue prepared me well for my subsequent graduate education, and Purdue professors' pragmatic way of thinking has inspired me through my professional career to tackle difficult, but highly rewarding engineering problems. Purdue showed me, a young immigrant to this country, what America was all about - leadership, compassion, and a fair chance to excel. I owe much to Purdue, and I wish my alma mater all the best in her next 150 years."

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Dr. Anthony (Tony) Yen is ASML’s Vice President and Head of Technology Development Centers Worldwide, responsible for providing the company with mid- and long-term semiconductor technology roadmaps, working with leading-edge customers, and collaborating with peers and university/independent research groups on infrastructure projects that support and enable these roadmaps.

Prior to his current position, Dr. Yen was with TSMC (2006 – 2017) where he led the development of EUV lithography, including its mask technology, for high-volume manufacturing of integrated circuits. Earlier in his career, he was a researcher with Texas Instruments (1991 – 1997) where he worked on various techniques to enhance the practical resolution of microlithography.  From 1997 to 2003, he was with TSMC where he first led the group that developed lithography processes for TSMC's 0.25, 0.18, 0.15, and 0.13 micron generations of logic integrated circuits and then co-led infrastructure building for next-generation lithography technologies at SEMATECH.  From 2003 to 2006 he was with Cymer (subsequently acquired by ASML) where he headed its marketing organization.  Dr. Yen has over 100 U.S. patents and 90 publications. He is a fellow of SPIE and of IEEE.

Dr. Yen holds a bachelor’s degree from Purdue University and a MBA and Ph.D. from MIT.