ECE 59500 - Integrated Circuit/MEMS Fabrication Laboratory

Course Details

Lecture Hours: 3 Credits: 3

Areas of Specialization:

  • Microelectronics and Nanotechnology

Counts as:

Normally Offered:

Each Fall, Spring


On-campus and online

Catalog Description:

This course is an updated version of ECE 55700 and will provide students state-of-the-art knowledge in the area of Micro and Nanofabrication Technology. Course topics include substrate, oxidation, lithography, etching (dry and wet), thin film deposition (physical vapor deposition, chemical vapor deposition, atomic layer deposition, epitaxy), diffusion and ion implantation, chemical mechanical polishing, metallization, packaging and integration. The course will include both lectures and hands-on training.

Required Text(s):

  1. Silicon VLSI Technology: Fundamentals, Practice, and Modeling , Plummer, James D.; Deal, Michael; Griffin, Peter B. , Pearson , July 2000 , ISBN No. 978-0130850379

Recommended Text(s):


Lecture Outline:

Days Topic
1 Intro and MEMS and non-MOS devices
2 MOS devices
3 Substrate engineering
4 Oxidation
5 Diffusion and ion implantation
6 Lithography
7 Etching
8 Lab on safety training
9 Lab on oxidation, TEOS and poly deposition (MOSCAP and MEMS cantilever)
10 Thin film deposition
11 Lab on MOSCAP and MEMS cantilever fabrication (Lithography), RIE, VHF or BOE based etching of released cantilevers)
12 Back end technology
13 Integration strategy
14 Lab on MOSCAP and MEMS cantilever fabrication (RIE for both, VHF or BOE based etching of released cantilevers)
15 Lab on MOSCAP characterization

Assessment Method:

Homework (group and individual) and exams