ECE 59500 - Semiconductor Manufacturing

Note:

This course will run the last five weeks of the semester.

Course Details

Lecture Hours: 3 Credits: 1

Counts as:

  • EE Elective
  • CMPE Special Content Elective

Normally Offered:

Each Spring

Requisites:

[MA 26200 or MA 26600] and [PHYS 27200 or PHYS 24100] and CHM 11500 and [ECE 59500 Microfabrication Fundamentals or (ECE 59500 MEMS I: Microfabrication and Materials for MEMS)

Requisites by Topic:

Differential equations, introductory physics (mechanics, electricity and magnetism), introductory chemistry.

Catalog Description:

Introduction to manufacturing processes suitable for CMOS and CMOS-compatible integrated devices. Unit processes for multi-level metal interconnects, including physical deposition, plasma enhanced chemical vapor deposition, copper plating, chemical mechanical polishing of dielectrics and metals. Process development of Si/Ge, low-k dielectrics, metal gates, 3D NANDs and photonic devices, etc.

Required Text(s):

None.

Recommended Text(s):

  1. Fabrication Engineering at the Micro- and Nanoscale , 4th Edition , Campbell, Stephen A. , Oxford University Press , 2012 , ISBN No. 9780199861224
  2. Introduction to Semiconductor Manufacturing Technology , 2nd Edition , Xiao, Hong , SPIE Press , 2012 , ISBN No. 9780819490926

Lecture Outline:

Week Topic
1 Front-end processing for advanced CMOS Silicon-on-insulator substrates, shallow-trench insulation, self-aligned silicide, metal gate, atomic-layer deposition for low-k dielectrics.
2 Back-end processing for copper interconnects Physical vapor deposition, plasma enhanced chemical vapor deposition
3 Damascene process, copper plating, chemical mechanical polishing of dielectrics and metals.
4 Process development and integration. 3D NANDs, through-silicon vias (TSV), silicon photonic devices. Hetero-integration.
5 Packaging, statistical processing control. Exam

Assessment Method:

This course will be graded on homework, reports and exams.