ECE 59500 - Microfabrication Fundamentals


This course is offered during the first five weeks of the semester.

Course Details

Lecture Hours: 3 Credits: 1

Counts as:

  • EE Elective
  • CMPE Selective - Special Content

Normally Offered:

Each Spring


On-campus only


MA 26600 and [PHYS 27200 or PHYS 24100] and CHM 11500

Requisites by Topic:

Differential equations, introductory physics (mechanics, electricity and magnetism), introductory chemistry.

Catalog Description:

Introduction to principles of microfabrication, including lithography, deposition, etching and planarization. This course provides a framework for understanding processes used in manufacturing of semiconductor devices, integrated circuits, microphotonic and micro-electromechanical systems (MEMS) components.

Required Text(s):

  1. The Science and Engineering of Microelectronic Fabridation , 2nd Edition , Campbell, S.A. , Oxford University Press

Recommended Text(s):

  1. Fundamentals of Microfabrication , 2nd Edition , Madoum M. , CRC Press
  2. Micromachined Transducers Source Book , Kovacs, G. , McGraw-Hill, Inc.
  3. Modular Series on Solid State Devices, Volume V: Introduction to Microelectronic Fabridation , Jaeger, Richard C. , Addison-Wesley Publishing Co. , 1988

Learning Outcomes:

A student who successfully fulfills the course requirements will have demonstrated an ability to:
  1. describe physical phenomena associated with basic microfabrication processes. [4,7]
  2. quantitatively model basic microfabrication processes. [1,4,7]

Lecture Outline:

Week Topic
1 Overview of Microfabrication, Process Flow, Lithography
2 Lithography, Physical Vapor Deposition, Metal Films/Contacts
3 Chemical Vapor Deposition, Etching, Oxidation, and planarization
4 Diffusion, Ion Implantation, MEMS processing overview
5 Manufacturing and Yield (2 lectures during term will be exam periods)

Engineering Design Consideration(s):

  • Economic
  • Environmental
  • Societal
  • Global

Assessment Method:

This course is graded on homework, reports and exams.