ECE 59500 - Microfabrication Fundamentals

Lecture Hours: 3 Credits: 1

This is an experiential learning course.

Counts as:
CMPE Special Content Elective
EE Elective

Experimental Course Offered: Spring 2019, Spring 2020

MA 26600 and [PHYS 27200 or PHYS 24100] and CHM 11500

Requisites by Topic:
Differential equations, introductory physics (mechanics, electricity and magnetism), introductory chemistry.

Catalog Description:
Introduction to principles of microfabrication, including lithography, deposition, etching and planarization. This course provides a framework for understanding processes used in manufacturing of semiconductor devices, integrated circuits, microphotonic and micro-electromechanical systems (MEMS) components.

Supplementary Information:
This course is offered during the first five weeks of the semester.

Required Text(s):
  1. The Science and Engineering of Microelectronic Fabridation, 2nd Edition, Campbell, S.A., Oxford University Press.
Recommended Text(s):
  1. Fundamentals of Microfabrication, 2nd Edition, Madoum M., CRC Press.
  2. Micromachined Transducers Source Book, Kovacs, G., McGraw-Hill, Inc..
  3. Modular Series on Solid State Devices, Volume V: Introduction to Microelectronic Fabridation, Jaeger, Richard C., Addison-Wesley Publishing Co., 1988.

Learning Outcomes:

A student who successfully fulfills the course requirements will have demonstrated an ability to:
  1. describe physical phenomena associated with basic microfabrication processes. [4,7]
  2. quantitatively model basic microfabrication processes. [1,4,7]

Lecture Outline:

Week Topic
1 Overview of Microfabrication, Process Flow, Lithography
2 Lithography, Physical Vapor Deposition, Metal Films/Contacts
3 Chemical Vapor Deposition, Etching, Oxidation, and planarization
4 Diffusion, Ion Implantation, MEMS processing overview
5 Manufacturing and Yield (2 lectures during term will be exam periods)

Engineering Design Consideration(s):