ECE 59500 - Microfabrication FundamentalsLecture Hours: 3 Credits: 1
This is an experiential learning course.
CMPE Special Content Elective
Experimental Course Offered: Spring 2019, Spring 2020
MA 26600 and [PHYS 27200 or PHYS 24100] and CHM 11500
Requisites by Topic:
Differential equations, introductory physics (mechanics, electricity and magnetism), introductory chemistry.
Introduction to principles of microfabrication, including lithography, deposition, etching and planarization. This course provides a framework for understanding processes used in manufacturing of semiconductor devices, integrated circuits, microphotonic and micro-electromechanical systems (MEMS) components.
This course is offered during the first five weeks of the semester.
- The Science and Engineering of Microelectronic Fabridation, 2nd Edition, Campbell, S.A., Oxford University Press.
- Fundamentals of Microfabrication, 2nd Edition, Madoum M., CRC Press.
- Micromachined Transducers Source Book, Kovacs, G., McGraw-Hill, Inc..
- Modular Series on Solid State Devices, Volume V: Introduction to Microelectronic Fabridation, Jaeger, Richard C., Addison-Wesley Publishing Co., 1988.
Learning Outcomes:A student who successfully fulfills the course requirements will have demonstrated an ability to:
- describe physical phenomena associated with basic microfabrication processes. [4,7]
- quantitatively model basic microfabrication processes. [1,4,7]
|1||Overview of Microfabrication, Process Flow, Lithography|
|2||Lithography, Physical Vapor Deposition, Metal Films/Contacts|
|3||Chemical Vapor Deposition, Etching, Oxidation, and planarization|
|4||Diffusion, Ion Implantation, MEMS processing overview|
|5||Manufacturing and Yield (2 lectures during term will be exam periods)|
Engineering Design Consideration(s):