ECE 59500 - MEMS III: Applications in MEMS


This course is the final 1-credit module in a 3-module series that runs the last five weeks of the semester.

Course Details

Lecture Hours: 3 Credits: 1

Areas of Specialization:

  • Microelectronics and Nanotechnology

Counts as:

  • EE Elective
  • CMPE Selective - Special Content

Normally Offered:

Each Fall


On-campus only



Catalog Description:

This module surveys both established and emergent applications of MEMS. With the growing demand for cheap, microscale, low power sensors, the first part of this course will cover MEMS sensor applications including inertial, chemical, field, and IR sensor devices. We will discuss limits of sensitivity, design, fabrication, and system-level integration. Other topics will include microrobotics, optical MEMS, BioMEMS and Lab on a Chip, and quantum computing with MEMS/NEMS.

Required Text(s):

  1. Practical MEMS , Kaajakari, Ville , Las Vegas: Small Gear Pub , 2009

Recommended Text(s):


Learning Outcomes

A student who successfully fulfills the course requirements will have demonstrated:

  • an understanding of noise in MEMS
  • an ability to design and analyze MEMS sensors
  • an ability to design micro robotic actuators
  • an understanding of state of the art in optical MEMS, BioMEMS, and quantum computing with MEMS

Lecture Outline:

Lecture Topic
1 Noise in micromechanical systems
2 Physical Sensors: XLs
3 Physical Sensors: Gyros
4 Chemical and field sensors
5 IR sensor: Bolometer
6 Optical MEMS, TI DMD case study
7 Actuators/Microrobots
8 Microfluidics/BioMEMS
9 Quantum computing with MEMS

Assessment Method:

Homework and exam