ECE 55700 - Integrated Circuit/MEMS Fabrication Laboratory

Lecture Hours: 1 Lab Hours: 5 Credits: 3

Areas of Specialization(s):

Microelectronics and Nanotechnology

Professional Attributes
EE Elective
Upper Level Lab

Normally Offered: Each Fall, Spring

Requisites:
ECE 30500

Catalog Description:
Laboratory exercises in the fabrication and testing of silicon integrated circuits and MEMS devices. Two test chips are fabricated and tested, i.e. (i) diode test chip, and (ii) MOSFET test chip OR a MEMS switch test chip. Laboratory technique, the technology of integrated circuit and MEMS fabrication, and device characterization are emphasized. Computer simulation is performed with the projects.

Required Text(s):
  1. Fabrication Engineering at the Micro and Nanoscale, 4th Edition, S.A. Campbell, Oxford University Press, 2012, ISBN No. 9780199861224.
Recommended Text(s):
  1. Fundamentals of Microfabrication, 2nd Edition, M. Madou, CRC Press.
  2. Micromachined Transducers Source Book, G. Kovacs, McGraw Hill.
  3. Microsystem Design, S. Senturia, Kluwer Academic Press.
  4. Modular Series on Solid State Devices, Volume V: Introduction to Microelectronic Fabrication, Richard C Jaeger, Addison-Wesley, 1988.
  5. Silicon Processing for the VLSI Era, S. Wolf and R. N. Tauber, Lattice Press.
  6. VLSI Technology, S. M. Sze, McGraw-Hill.

Lecture Outline:

Week Topic
1 Course/Lab Introduction
2 Overview of Microelectronic and MEMS Fabrication
3 Electronic Device Fundamentals
4 Oxidation
5 Diffusion
6 Ion Implant
7 Lithography
8 Etching
9 Thin films
10 Simulation/SUPREM/MINIMOS/ANSYS
11 MEMS Processing Modules 1
12 MEMS Processing Modules 2
13 BioMEMS Processing Modules
14 MEMS Device Examples
15 Manufacturing and Yield

Lab Outline:

Week Topic
1-9 3 mask diode fabrication process
7-15 4 mask PMOS fabrication process OR 4 mask MEMS metal cantilever/switch fabrication process