ECE 49595 - Introduction to MEMS

Lecture Hours: 3 Credits: 3

This is an experiential learning course.

Counts as:
CMPE Special Content Elective
EE Elective

Experimental Course Offered: Fall 2017, Fall 2018

(ECE 20001 or ECE 20100) and (PHYS 27200 or PHYS 24100 or PHYS 25100 or PHYS 26100)

Catalog Description:
Microelectromechanical devices (MEMS), such as pressure sensors, accelerometers, rate gyroscopes, and opto-mechanical assemblies and displays, require knowledge of a broad range of disciplines, from microfabrication to mechanics to electromagnetism. This course presents an introduction to this broad field, using examples, design projects, and hands-on labs drawn from real-world MEMS applications. Lectures will cover microfabrication technologies and process flow development, material properties, structural behavior of MEMS devices, transducers, and thermal domain. Later in the course, we will focus on case studies in MEMS, such as Digital Light Projection (DLP), micromachined accelerometers, and Film Bulk Acoustic Resonators (FBARs). Several hands-on assignments throughout the course will provide an opportunity for measurement and characterization of devices studied in class.

Required Text(s): None.

Recommended Text(s): None.

Learning Outcomes:

A student who successfully fulfills the course requirements will have demonstrated:
  1. an ability to generate a process flow for microfabrication of MEMS. [None]
  2. the ability to perform static and dynamic analysis of MEMS devices using lumped element modeling. [None]
  3. an understanding of transduction mechanisms in MEMS. [None]
  4. an understanding of thermal domain in MEMS, including actuation, sensing, dissipation, and effects on stability. [None]
  5. the ability to design MEMS sensors and actuators. [None]
  6. ability to perform measurements on MEMS devices and analyze data. [None]

Lecture Outline:

Week Topics
1 Introduction to MEMS
2-3 Microfabrication + Birck Fab Lab
4 Beams + COMSOL
5 Lumped element modeling
6-7 Capacitive transducers + Kenny DETF resonator lab
8 Piezoelectric Transducers
9 Piezoresistive
10-11 Thermal domain
12 Microfluidics and BioMEMS
13-14 Case studies - ADI XL, TI DLP, Avago FBAR, microphone
15 Final project presentations