ECE 595R - RF MEMS For Intelligent Communication Systems

Lecture Hours: 3 Credits: 3

Counts as:

Experimental Course Offered: Spring 2007

Catalog Description:
This course focuses on the modeling, design, technology and applications of RF Micro-Electro-Mechanical Systems (MEMS). Students in this course will develop a strong understanding of how RF MEMS technology benefits the fields of intelligent communication systems, radars and sensors. The class begins by introducing linear and non-linear electromechanical models for RF MEMS devices through analytical and numerical techniques. The high potential of RF MEMS on building a variety of reconfigurable high-frequency components and systems is subsequently presented in detail. Finally, several research topics including reliability, packaging and novel architectures are introduced.

Supplementary Information:
Engineering Design Content

  • Synthesis of smart communication networks and sensors by analytical and numerical techniques.
  • Design and development of fabrication and characterization methods.

Engineering Design Considerations

The course will discuss the development of sensors for environmental monitoring and protection against biological and chemical threats. It will also focus on intelligent networks capable of adapting to their environments and surviving in extreme conditions.

Required Text(s):
  1. RF MEMS - Theory, Design and Technology, 1st Edition, Gabriel M. Rebeiz, John Wiley & Sons, 2003, ISBN No. 0471201693.
  2. Schaum's Outline of Strength of Materials, 4th Edition, William A. Nash, McGraw-Hill, 1998, ISBN No. 0070466173.
Recommended Text(s):
  1. Microsensors MEMS and Smart Devices, 1st Edition, Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, John Wiley & Sons, 2001, ISBN No. 047186109X.
  2. Microsystem Design, 1st Edition, Stephen D. Senturia, Kluwer Academic Publishers, 2000, ISBN No. 0792372468.
  3. RF MEMS & Their Applications, 1st Edition, Vijay K. Varadan, K.J. Vinoy, K.A. Jose, Johy Wiley & Sons, 2003, ISBN No. 047084308X.

Learning Outcomes:

A student who successfully fulfills the course requirements will have demonstrated:
  1. an understanding of simple linear and non-linear mechanical, electromagnetic and electromechanical models of RF MEMS structures. [a,b]
  2. an ability to design practical RF MEMS devices using analytical and numerical techniques. [c,e]
  3. an ability to design high-performance circuits and sub-systems using RF MEMS components. [c,e]
  4. an understanding of the limitations of the RF MEMS technology for wireless applications. [e,f]

Lecture Outline:

Week Topic
1/2 Introduction to RF MEMS RF MEMS vs. solid state components Application areas and case studies RF MEMS development around the world
1 Review of basic mechanics and elements of strength of materials Stress and strain Stresses of beams Deflection of beams and spring constants
2 Mechanical modeling of MEMS switches Static analysis Dynamic analysis
2 1/2 Review of Electromagnetic analysis and modeling Transmission lines & high-frequency effects Scattering parameters Review of numerical techniques
1 Electromagnetic modeling of RF MEMS switches distributed models lumped-element models
1 Review of MEMS fabrication Bulk micromachining
1/2 Case studies of RF MEMS switches
1/2 RF MEMS inductors
1 FR MEMS varactors
1/2 Switching networks series and shunt configurations capacitive vs. ohmic contact absorptive switches
1 RF MEMS Phase shifters
1 RF MEMS filters
1/2 RF MEMS antennas
1 Research issues Reliability Packaging Novel system architectures
1 Project presentations and discussions

Engineering Design Content:


Engineering Design Consideration(s):