ECE 59500 - Computational Lithography
Course Details
Lecture Hours: 1 Credits: 1
Areas of Specialization:
- Microelectronics and Nanotechnology
Counts as:
Normally Offered:
Each Fall
Campus/Online:
On-campus and online
Requisites:
ECE 59500, Intro to Nanolithography and ECE 59500, EUV Lithography
Catalog Description:
This course is the third in a series of three 1-credit courses on semiconductor lithography. This course covers the specific aspects of computational lithography, including physics of sub-wavelength image formation; Fourier imaging at the diffraction limit; forward model for patterning simulations; and applications in manufacturing.
Required Text(s):
- Optical and EUV Lithography - A Modeling Perspective , Andreas Erdmann , SPIE Press , ISBN No. 9781510639010
Recommended Text(s):
None.
Learning Outcomes
A student who successfully fulfills the course requirements will have demonstrated an ability to:
- Describe the physics of sub-wavelength image formation in a scanner by correctly invoking of the principles of Fourier optics
- Explain how the physics of image formation can be captured into either an Abbe or a Hopkins mathematical model as well as explain which model is most appropriate depending on the use case.
- Identify the four components that together are the basis for a forward computational model for the full patterning process and can describe how these models can be calibrated with experimental data.
- Describe the three major applications of computational lithography in process development and mask making.
- Give several detailed examples of the use of computational lithography in wafer manufacturing.
Lecture Outline:
Major Topics | |
---|---|
1 | Physics of sub-wavelength image formation |
2 | Fourier imaging at the diffraction limit |
3 | Forward model for patterning simulations (mask, optical, resist, etch) |
4 | Applications in mask data prep (SMO, OPC, LMC) |
5 | Applications in manufacturing (OVL/CD control, lens heating, target design, ...) |
Assessment Method:
Quizzes, homework, discussions (12/2024)