ECE 59500 – MEMS III: Applications in MEMS

Lecture Hours: 1 

Credits: 1

Area of Specialization: Microelectronics and Nanotechnology (MN)

Requisites: MEMSII or equivalent

Catalog Description:
This module surveys both established and emergent applications of MEMS. With the growing demand for cheap, microscale, low power sensors, the first part of this course will cover MEMS sensor applications including inertial, chemical, field, and IR sensor devices. We will discuss limits of sensitivity, design, fabrication, and system-level integration. Other topics will include microrobotics, optical MEMS, BioMEMS and Lab on a Chip, and quantum computing with MEMS/NEMS.

Learning Outcomes:

  1. Explain noise in MEMS.
  2. Design and analyze MEMS sensors.
  3. Design micro-robotic actuators.
  4. Explain state-of-the-art technology in optical MEMS, BioMEMS, and quantum computing with MEMS.

Required Text(s): Kaajakari, Ville. Practical MEMS. Las Vegas, Nev.]: Small Gear Pub., 2009. Print.