ECE 59500 – MEMS II: Fundamentals of MEMS Design
Lecture Hours: 1
Credits: 1
Area of Specialization: Microelectronics and Nanotechnology (MN)
Catalog Description:
This module introduces the fundamentals of MEMS design. We begin with the design and analysis of micromechanical springs most commonly used in successful MEMS devices. Next, we investigate popular transduction mechanisms, which allow the needed conversion of energy between electrical signals and mechanical motion (and vice versa). This is a critical component of all MEMS actuators and sensors. The course focuses primarily on electrostatic and piezoelectric transduction. Modeling of MEMS devices is then considered, with focus on linearized models and electromechanical resonance.
Learning Outcomes:
- Design and analyze MEMS springs.
- Design and analyze capacitive transducers for MEMS devices.
- Design and analyze piezoelectric transducers for MEMS devices.
- Model linearized MEMS devices and transducers.
Required Text(s): Kaajakari, Ville. Practical MEMS. Las Vegas, Nev.]: Small Gear Pub., 2009. Print.