ECE 59500 – MEMS I: Microfabrication and Materials for MEMS
Lecture Hours: 1
Credits: 1
Area of Specialization: Microelectronics and Nanotechnology (MN)
Catalog Description:
This course introduces the fundamentals of microfabrication used for wafer-scale manufacturing of Microelectromechanical Systems (MEMS). Borrowing some techniques from the integrated circuit (IC) fabrication and engineering new techniques to solve MEMS-specific challenges, MEMS microfabrication boasts an extensive toolbox employed both in research-level prototyping and in mass production in MEMS industry.
The course reviews key methods for deposition, patterning, release, and packaging of MEMS devices. Considerations for benefits and levels of integration of MEMS and ICs are discussed. Micro-fabrication case studies of several MEMS devices are reviewed.
Learning Outcomes:
- Develop a viable micro-fabrication process to meet design specifications.
- Back-engineer process flows from known MEMS structures.
- Select materials appropriate for a particular microfabricated structure and process.
- Explain metrology methods for MEMS microfabrication.
Required Text(s): None