Fundamentals of MEMS
Key topics in micro-electro-mechanical systems (MEMS) and biological micro-integrated systems; properties of materials for MEMS; microelectronic process modules for design and fabrication.
BME58100/ECE 52600
Credit Hours:
3Learning Objective:
Key aim is to learn micro-electro-mechanical systems (MEMS) and micro-integrated system. Properties of useful materials will be discussed in context to MEMS and BioMEMS. Micro-electronics process modules used in the design and fabrication of MEMS and micro-integrated systems will be presented. Applications of these systems in a variety of sensors and transducers for broad ranges of implantable biomedical applications will be described. Recent advances in wearable biomedical applications of MEMS and bioMEMS will also be discussed in detail.Description:
Key topics in micro-electro-mechanical systems (MEMS) and biological micro-integrated systems; properties of materials for MEMS; microelectronic process modules for design and fabrication.
Topics Covered:
Introduction to MEMS/BioMEMS (I) Introduction to MEMS/BioMEMS (II) Materials for MEMS/BioMEMS (I) Materials for MEMS/BioMEMS (II) Micro/Nano-Positioning/Manipulation (I) (HW1 Issued)Micro/Nano-Positioning/Manipulation (II)
MEMS Process: Microfabrication Technology
MEMS Process: Photolithography (HW1 Due)
MEMS Process: Deposition and Doping I
MEMS Process: Deposition and Doping II (HW2 Issued)
MEMS Process: Etching
Polymer MEMS I
Polymer MEMS II (HW2 Due)
Midterm
Soft MEMS and Robotics
Flexible MEMS I: Transfer Printing Methods
Flexible MEMS II: Modern Transfer Printing Methods
Wearable MEMS I: Materials and Design Layouts
Wearable MEMS II: Fabrications and Applications
Mechanics Design for MEMS Devices (Final Project Issued)
Biomimetic MEMS
Skin-mountable MEMS Devices: Basics
Skin-mountable MEMS Devices: Clinical Implementations
Implantable MEMS Devices: Basics
Implantable MEMS Devices: Clinical Implementations
Energy Harvesting for BioMEMS
BioMEMS Case Studies I
BioMEMS Case Studies II
Prerequisites:
Sr. or Graduate standing plus consent of instructor; Calculus and Differential Eq., Fundamentals of Physics (Mechanics, Optics, Electricity and magnetism), Fundamentals of Inorganic Chemistry.Applied / Theory:
80 / 20Web Address:
https://mycourses.purdue.edu/.Web Content:
Syllabus, grades, lecture notes, homework, solutions, chat, message boardHomework:
No HomeworkProjects:
There won't be a final project, instead students will do 2 design micro-projectsExams:
3 Exams, each a combination of written and MC questionsTextbooks:
- PRACTICAL MEMS: DESIGN OF MICROSYSTEMS, ACCELEROMETERS, GYROSCOPES, RF MEMS, OPTICAL MEMS, AND MICROFLUIDIC SYSTEMS BY VILLE KAAJAKARI
- MICROMACHINED TRANSDUCERS SOURCEBOOK 1ST EDITION BY GREGORY KOVACS
- FOUNDATIONS OF MEMS 2ND EDITION BY CHANG LIU
- INTRODUCTION TO BIOMEMS 1ST EDITION BY ALBERT FOLCH