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Fundamentals of MEMS


Credit Hours:


Learning Objective:

Key aim is to learn micro-electro-mechanical systems (MEMS) and micro-integrated system. Properties of useful materials will be discussed in context to MEMS and BioMEMS. Micro-electronics process modules used in the design and fabrication of MEMS and micro-integrated systems will be presented. Applications of these systems in a variety of sensors and transducers for broad ranges of implantable biomedical applications will be described. Recent advances in wearable biomedical applications of MEMS and bioMEMS will also be discussed in detail.


Key topics in micro-electro-mechanical systems (MEMS) and biological micro-integrated systems; properties of materials for MEMS; microelectronic process modules for design and fabrication. Students will prepare a project report on the design of a biomedical MEMS-based micro-integrated system.

Topics Covered:

Introduction to MEMS/BioMEMS (I) Introduction to MEMS/BioMEMS (II) Materials for MEMS/BioMEMS (I) Materials for MEMS/BioMEMS (II) Micro/Nano-Positioning/Manipulation (I) (HW1 Issued)
Micro/Nano-Positioning/Manipulation (II)
MEMS Process: Microfabrication Technology
MEMS Process: Photolithography (HW1 Due)
MEMS Process: Deposition and Doping I
MEMS Process: Deposition and Doping II (HW2 Issued)
MEMS Process: Etching
Polymer MEMS I
Polymer MEMS II (HW2 Due)
Soft MEMS and Robotics
Flexible MEMS I: Transfer Printing Methods
Flexible MEMS II: Modern Transfer Printing Methods
Wearable MEMS I: Materials and Design Layouts
Wearable MEMS II: Fabrications and Applications
Mechanics Design for MEMS Devices (Final Project Issued)
Biomimetic MEMS
Skin-mountable MEMS Devices: Basics
Skin-mountable MEMS Devices: Clinical Implementations
Implantable MEMS Devices: Basics
Implantable MEMS Devices: Clinical Implementations
Energy Harvesting for BioMEMS
BioMEMS Case Studies I
BioMEMS Case Studies II
Final Project
Final Project


Sr. or Graduate standing plus consent of instructor; Calculus and Differential Eq., Fundamentals of Physics (Mechanics, Optics, Electricity and magnetism), Fundamentals of Inorganic Chemistry.

Applied / Theory:

50 / 50

Web Address:

Web Content:

Syllabus, grades, lecture notes, homework, solutions, chat, message board


Four homework assignments will be evenly distributed throughout the semester. All assignments MUST be submitted with hardcopies at the start of the class lecture. No late assignments will be accepted unless specific arrangements are made. Students are required to complete the homework independently. Students are requested to submit clear and complete solutions. The homework will be evaluated mainly based on the correctness and completeness of the solutions. Clarity is also an important factor. Students will be asked to take full responsibility for any detected plagiarism.


A final project will require you to integrate and apply knowledge and skills obtained throughout the course to investigate an area of MEMS and BioMEMS and their novel applications in biomedical devices. These projects will be completed over the last month of the course. A formal presentation of the findings will be presented to the class during the final week(s) of lectures. The final presentations will be evaluated by your peers, and the instructor for clarity, logical progression, in-depth understanding, correctness and significance of findings, in such order. The final project report (5 pages in maximum including figures, 12 pts, Times New Roman, double-spacing, references cited in the last page which is not included in the page limit) will be evaluated by instructor.


Midterm exam is intended to assess the understanding and integration of the course materials from lectures.


  • Chang Liu, Foundations of MEMS, 2nd Edition, Pearson/Prentice Hall, 2011. (Introductory-Intermediate)
  • Stretchable Electronics, Takao Someya, WILEY-VCH. ISBN: 978-3-527-32978-6 (2013). (This book is available to download free in Purdue library. Handouts will be distributed when lecture topics are not included in the book.)

Computer Requirements:

ProEd minimum requirements

ProEd Minimum Requirements:


Tuition & Fees: