Fundamental of BioMEMS and Micro-Integrated Systems
ECE52600
Credit Hours:
3Description:
Key topics in biomedical micro-electro-mechanical systems (Bio-MEMS) and micro-integrated systems are covered. Biological concepts related to the BioMEMS are reviewed. Silicon process modules and soft-lithography processes used in the design and fabrication of BioMEMS and micro-integrated systems are presented. Applications of these systems in a variety of sensors and transducers are described. Recent advances in BioMEMS, Lab-on-a-Chip, and related advanced topics are discussed.