ECE 69500 - Principles and Methods of Nanofabrication

Note:

Assignments, Expectations and Grading: Midterms (two): 20% each Problems-of-the-week: 10% (+ bonus points) Key Paper Search (individual): 20% Nanofabrication Challenge Proposals (group): 30%

Course Details

Lecture Hours: 3 Credits: 3

Counts as:

Experimental Course Offered:

Fall 2011, Fall 2013, Spring 2016

Requisites:

Graduate standing in engineering or science

Catalog Description:

Top-down and bottom-up approaches to the fabrication of nanoscale (<100 nm) features, materials, and devices; limits of optical and electron beam lithography; imprinting techniques; probe-based assembly; synthesis of nanostructures by solution methods, metal-catalyzed reactions, heteroepitaxy, phase separation; control of nucleation, coalescence and growth rate; directed self-organization of nanoscale features (pores, islands, clusters, tubes and wires); ion-beam and pulsed-laser processing at the nanoscale; stability of nanostructures

Required Text(s):

None.

Recommended Text(s):

None.

Lecture Outline:

Week Major Topics
1 Overview of nanotechnology; Discussion - future of nanotechnology; Societal impact; Limits of optical lithography
2 Limits of optical lithography; X-ray interactions with matter; X-ray sources; X-ray lithography
3 Proximity and EUV projection lithography; Electron and ion projection lithography
4 Electron beam lithography; Focused ion beam lithography
5 Overview of soft lithography; Microcontact printing; Micromolding; Nanoimprint lithography
6 Review of quantum confinement in 2D heterostructures; Heteroepitaxy, lattice mismatch and critical thickness
7 Midterm I; Quantum wires; Epitaxial growth on vicinal substrates; Growth on nonplanar patterned substrates
8 Quantum dots by heteroepitaxy; Vapor-liquid-solid growth of nanowires
9 Catalytic synthesis of carbon nanotubes.
10 Block copolymers for nanofabrication; Surface nanofabrication with soft materials; self-assembled monolayers.
11 Self-assembled templates for nanofabrication: porous anodic alumina, ion-track polycarbonate membranes, micelle templates, zeolites and MCM-41
12 Electrodeposition into porous templates; Review of nucleation theory under the assumptions of capillarity; Nucleation rate; Ostwald ripening
13 Gas-phase synthesis of nanoparticles; Colloidal synthesis of nanoparticles.
14 Midterm II; Sorting and assembly of nanoparticles and nanowires: fluidic self-assembly
15 Electrophoresis, dielectrophoresis and other methods of directed assembly