July 31, 2019
Fall 2019: ECE 595 Microelectromechanical devices (MEMS)
3 unique 1-credit modules
FALL 2019
Prof. Dana Weinstein
Microelectromechanical devices (MEMS), such as pressure sensors, accelerometers, rate gyroscopes, and optomechanical
assemblies and displays, require knowledge of a broad range of disciplines, from microfabrication
to mechanics to electromagnetism. We offer a series of 3 one-credit modules intended as an introduction to
MEMS primarily for graduate students and ambitious undergraduates. The split of content across three modules
is intended to improve flexibility for our undergrad and grad students, as well as for the Professional Masters
Program. Taking all three units sequentially over the course of the semester is equivalent a semester-long 3-
credit course and is encouraged for those who are seeking a comprehensive understanding of the field.
MEMS I: Microfabrication and Materials for MEMS (5 weeks)
Module Description
This module introduces the fundamentals of microfabrication used for wafer-scale manufacturing of Microelectromechanical Systems
(MEMS). Borrowing some techniques from the integrated circuit (IC) fabrication and engineering new techniques to solve MEMS specific
challenges, MEMS microfabrication boasts an extensive toolbox employed both in research-level prototyping and in mass
production in MEMS industry. The course reviews key methods for deposition, patterning, release, and packaging of MEMS devices.
Considerations for benefits and levels of integration of MEMS and ICs are discussed. Micro-fabrication case studies of several MEMS
devices are reviewed. Prerequisites: None.
MEMS II: Fundamentals of MEMS Design (5 weeks)
Module Description
This module introduces the fundamentals of MEMS design. We begin with the design and analysis of micromechanical springs most
commonly used in successful MEMS devices. Next, we investigate popular transduction mechanisms, which allow the needed
conversion of energy between electrical signals and mechanical motion (and vice versa). This is a critical component of all MEMS
actuators and sensors. The course focuses primarily on electrostatic and piezoelectric transduction. Modeling of MEMS devices is then
considered, with focus on linearized models and electromechanical resonance. Prerequisites: PHYS 172 and 272 or equivalent. Text:
Kaajakari, Ville. Practical MEMS. Las Vegas: Small Gear Pub., 2009. Print.
MEMS III: Applications in MEMS (5 weeks)
Module Description
This module surveys both established and emergent applications of MEMS. With the growing demand for cheap, microscale, low
power sensors, the first part of this course will cover MEMS sensor applications including inertial, chemical, field, and IR sensor devices.
We will discuss limits of sensitivity, design, fabrication, and system-level integration. Other topics will include microrobotics, optical
MEMS, BioMEMS and Lab on a Chip, and quantum computing with MEMS/NEMS. Prerequisites: ECE 595 MEMS II or equivalent Text:
Kaajakari, Ville. Practical MEMS. Las Vegas: Small Gear Pub., 2009. Print.