INVITED TALKS
Intelligent CMOS Sensors
MEMS Commercialization: Ingredients for Success
Ball Semiconductor Technology and its Application to MEMS

ACCELEROMETERS AND GYROSCOPE
A CMOS Z-Axis Capacitive Accelerometer with Comb-Finger Sensing
A 1mG Lateral CMOS-MEMS Accelerometer
Trident-Type Tuning Fork Silicon Gyroscope by the Phase Difference Detection
Capacitive Accelerometer with High Aspect Ratio Single Crystalline Silicon Microstructure Using the SOI Structure with Polysilicon-Based Interconnect Technique
Wafer Level Vacuum Packaged De-Coupled Vertical Gyroscope by A New Fabrication Process

ACTUATORS
Frequency Response of TiNi Shape Memory Alloy Thin Film Micro-Actuators
Batch Fabricated Flat Winding Shape Memory Alloy Actuator for Active Catheter
Paraffin Actuated Surface Micromachined Valves
Biomimetic Micro Actuators Based on Polymer Electrolyte/Gold Composite Driven by Low Voltage
Thin Flexible End-Effector Using Pneumatic Balloon Actuator
An AlN Piezoelectric Microactuator Array
Novel Acoustic-Wave Micromixer
The First Self-Priming and Bi-Directional Valve-Less Diffuser Micropump for Both Liquid and Gas
Long Throw and Rotary Output Electro-Thermal Actuators Based on Bent-Beam Suspensions
A Novel Bi-Directional Magnetic Microactuator Using Electroplated Permanent Magnet Arrays with Vertical Anisotropy

APPLICATIONS
Dual-Cantilever AFM Probe for Combing Fast and Coarse Imaging with High-Resolution Imaging
3D Flip-Up Structure of Porous Silicon with Actuator and Optical Filter for Microspectrometer Applications
Ink Jet Fabricated Nanoparticle MEMS
An Audio Frequency Filter Application of Micromachined Thermally-Isolated Diaphragm Structures Control
Parylene-Diaphragm Piezoelectric Acoustic Transducers
Electrical Isolation of Bulk Silicon MEMS Devices via Thermomigration
A Micro-Flight Mechanism with Rotational Wings
Synthesizing High-Performance Compliant Stroke Amplification Systems for MEMS
Optimization of Mechanical Interface for A Practical Micro-Reducer
One Mask Nickel Micro-Fabricated Reed Relay
Bending, Torsional and Extending Active Catheter Assembled Using Electroplating
Fabrication of A Three-Axis Accelerometer Integrated with Commercial 0.8µm-CMOS Circuits
Microrelays for Batch Transfer Integration in RF Systems
A High Resolution, Electrostatically-Driven Commercial Inkjet Head
MEMS Wing Technology for A Battery-Powered Ornithopter
Development of Chain-Type Micromachine for Inspection of Outer Tube Surfaces (Basic Performance of the 1st Prototype)

BIOLOGICAL DEVICES
Electrophoresis System with Integrated On-Chip Fluorescence Detection
DNA Analysis Based on Physical Manipulation
Topspot - A New Method for the Fabrication of Microarrays
Spiked Biopotential Electrodes
Advanced Hybrid Integrated Low-Power Telemetric Pressure Monitoring System for Biomedical Applications
A Passive Humidity Monitoring System for In-Situ Remote Wireless Testing of Micropackages

BONDING AND PACKAGING
Void-Free Full Wafer Adhesive Bonding
Glass-To-Glass Anodic Bonding for High Vacuum Packaging of Microelectronics and its Stability
Batch Transfer of LIGA Microstructures by Selective Electroplating and Bonding
Microrelay Packaging Technology Using Flip-Chip Assembly

ELECTROSTATIC ACTUATORS
Fabrication of the Planar Angular Rotator Using the CMOS Process
Microfabricated Tunable Bending Stiffness Device
Single Crystal Silicon (SCS) XY-Stage Fabricated by DRIE and IR Alignment
A Wafer-Integrated Array of Micromachined Electrostatically-Driven Ultrasonic Resonators for Microfluidic Applications
An Electrostatically-Actuated MEMS Switch for Power Applications
Electroplated RF MEMS Capacitive Switches
Fabrication, Simulation and Experiment of A Rotating Electrostatic Silicon Mirror With Large Angular Deflection
Imaging of Micro-Discharge in A Micro-Gap of Electrostatic Actuator
Microscale Tribology (Friction) Measurement and Influence of Crystal Orientation and Fabrication Process

FLUIDICS HANDLING
A Check-Valved Silicone Diaphragm Pump
A Normally Closed In-Channel Micro Check Valve
A Vaporizing Water Micro-Thruster
Ultrasonic Micromixer for Microfluidic Systems
A High Pressure-Resistance Micropump Using Active and Normally-Closed Valves
A Bi-Directional Electrochemically Driven Micro Liquid Dosing System with Integrated Sensor/Actuator Electrodes
Phase Change in Microchannel Heat Sink Under Forced Convection Boiling
Characterization of Bi-Directionally Oscillating Dynamic Flow and Frequency-Dependent Rectification Performance of Microdiffusers
A Fast and Low-Volume Pipettor with Integrated Sensors for High Precision
A Low Temperature Biochemically Compatible Bonding Technique Using Fluoropolymers for Biochemical Microfluidic Systems
Microfluidic Oscillator Using Vapor Bubble on Thin Film Heater
Micromachined Dispenser with High Flow Rate and High Resolution
Fabrication of Micromachined Pipettes in A Flow Channel for Single Molecule Handling of DNA
High Speed Random Separation of Microobject in Microchip by Laser Manipulator and Dielectrophoresis
An Air-To-Liquid MEMS Particle Sampler
Fluid Drive Chips Containing Multiple Pumps and Switching Valves for Biochemical IC Family - Development of SMA Drive 3D Micro Pumps and Valves in Leak-Free Polymer Package -
MEMS Flow Sensors for Nano-Fluidic Applications

MATERIALS AND METROLOGY
Nano-Scale Bending Test of Si Beam for MEMS
Measurement of Characteristics of Nanometric Mechanical Oscillators
Profile Measurement of High Aspect Ratio Micro Structures Using A Tungsten Carbide Micro Cantilever Coated with PZT Thin Films
Torque Measurement Method Using Air Turbine for Micro Devices
New Failure Mechanism in Silicon Nitride Resonators
Dominated Energy Dissipation in Ultrathin Single Crystal Silicon Cantilever: Surface Loss
Characterization of Silicon/Glass Anodic Bond Initiation Toughness

MODELING AND DESIGN
CMOS Micromechanical Bandpass Filter Design Using A Hierarchical MEMS Circuit Library
Static Friction in Elastic Adhesive MEMS Contacts, Models and Experiment
Failure Mechanisms of Pressurized Microchannels, Model and Experiments

NOVEL TECHNOLOGIES
Deep Reactive Ion Etching of Pyrex Glass
A New Deep Reactive Ion Etching Process by Dual Sidewall Protection Layer
A Method to Evade Microloading Effect in Deep Reactive Ion Etching for Anodically Bonded Glass-Silicon Structures
New Amorphous Alloys as Micromaterials and the Processing Technologies
Microfabrication Technology for Polycaprolactone, A Biodegradable Polymer
Embedded-Mask-Methods for mm-Scale Multi-Layer Vertical/Slanted Si Structures
Metal Film Protection of CMOS Wafers against KOH
In Situ Characterization of CMOS Post-Process Micromachining
Development of Injectable Polymer-Derived Ceramics for High Temperature
Micromachined Rubber O-Ring Micro-Fluidic Couplers
A Substrate-Independent Wafer Transfer Technique for Surface-Micromachined Devices
An Integrated Micro-Electrophoretic Chip Fabricated Using A New Stereolithographic Process
Fabrication and Hermeticity Testing of A Glass-Silicon Package Formed Using Localized Aluminum/Silicon-To-Glass Bonding
High Performance Scanning Thermal Probe Using A Low Temperature Polyimide-Based Micromachining Process
High Resolution Powder Blast Micromachining
Silicon Carbide Micro-Reaction-Sintering Using A Multilayer Mold

OPTICAL DEVICES
PZT Actuated Micromirror for Nano-Tracking of Laser Beam for High-Density Optical Data Storage
Single Crystal Silicon (SCS) MicroMirror Arrays Using Deep Silicon Etching and IR Alignment
Damping of Micro Electrostatic Torsion Mirror Caused by Air-Film Viscosity
Smart Phase-Only Micromirror Array Fabricated by Standard CMOS Process
A New Smart Vision System Using A Quick-Response Dynamic Focusing Lens
Self Aligned Vertical Mirrors and V-Grooves Applied to A Self-Latching Matrix Switch for Optical Networks
An Electrostatically Excited 2D-Micro-Scanning-Mirror with An In-Plane Configuration of the Driving Electrodes
Micro-Optical Switch with Uni-Directional I/O Fibers
Deformable Magnetic Mirror for Adaptive Optics: First Results
Long-Life Micro-Laser Encoder
Microconnectors for the Passive Alignment of Optical Waveguides and Ribbon Optical Fibers
3-D Microsystem Packaging for Interconnecting Electrical, Optical and Mechanical Microdevices to the External World
Stretched-Film Micromirrors for Improved Optical Flatness
Micromachined, Fiber-Optic Based Accelerometer with Shutter Modulation
A Fast, Robust and Simple 2-D Micro-Optical Scanner Based on Contactless Magnetostrictive Actuation
A One-Chip Scanning Retina with An Integrated Micro-Mechanical Scanning Actuator for A Compound Eye Visual Sensor

PIEZOELECTRIC ACTUATORS
Ultrasonically Driven Surface Micromachined Motor
Planer Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating
Micromachined Piezoelectric Elastic Force Motor (EFM)
Performance of Hydrothermal PZT Film on High Intensity Operation

SENSORS
N-Well Based CMOS Calorimetric Chemical Sensors
A New Uncooled Thermal IR Detector Using Silicon Diode
A Novel Micro Gas Sensor with High Selectivity Based on Both Mass and Conductivity Measurement
A New Polycrystalline Silicon Technology for Integrated Sensor Applications
Surface Micromachined Bridge Configurations for Accurate Angle Measurements
A Monolithic Fully-Integrated Vacuum-Sealed CMOS Pressure Sensor
High-Precision Silicon Differential Pressure Sensor Monolithically Integrated with Twin Diaphragms and Micro Over-Range Protection Structures
A Vacuum Packaged Differential Resonant Accelerometer Using Gap Sensitive Electrostatic Stiffness Changing Effect
A Foundry Fabricated High-Speed Rotation Sensor Using Off-Chip RF Wireless Signal Transmission
Flexible Shear Stress Sensor Skin for Aerodynamics Applications
A New Class of Thermal Flow Sensors Using ÆT=0 as A Control Signal
An Air Flow Sensor Modeled on Wind Receptor Hairs of Insects
Pressure, Flow and Oxygen Saturation Sensors on One Chip for Use in Catheters
Mass Flowmeter Using A Multi-Sensor Chip
Monolithic Integrated Surface Micromachined Pressure Sensors with Analog On-Chip Linearization and Temperature Compensation
Contamination Insensitive Differential Capacitive Pressure Sensors

3-D STRUCTURES
Direct Writing for Three-Dimensional Microfabrication Using Synchrotron Radiation Etching
An Improved TMAH Si-Etching Solution without Attacking Exposed Aluminum
Characterization of Silicon Isotropic Etch by Inductively Coupled Plasma Etch in Post-CMOS Processing
A Novel Fabrication Method for 3-D Microstructures Using Surface-Activated Bonding of Thin Films
3D Nano Wire-Frame for Handling and Observing A Single DNA Fiber
A Novel Fabrication Process for High-Aspect-Ratio and Co-Axial Multi-Layer Nickel Microstructures
Electrical Isolation Process for Molded, High-Aspect-Ratio Polysilicon Microstructures
Fabrication of Sub-Micron Structures with High Aspect Ratio for MEMS Using Deep X-Ray Lithography
Single-Step Assembly of Complex 3-D Microstructures

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