• I. Ahmed, U. Rawat, J.-T. Chen, D. Weinstein, “Super-High-Frequency Low-Loss Sezawa Mode SAW Devices in a GaN/SiC Platform,” accepted for publication in Trans. on Ultrasonics, Ferroelectrics, and Frequency Control (Jan 2023).
  arXiv link

 

• J. Anderson, Y. He, B. Bahr, D. Weinstein, “Integrated acoustic resonators in commercial fin field-effect transistor technology,” Nature Electronics 5, 611-619 (2022).
  https://doi.org/10.1038/s41928-022-00827-6

 

• U. Rawat, J.D. Anderson, D. Weinstein, “Design and Application of Integrated Transducers in Commercial CMOS Technology,” Frontiers in Mech. Eng., Sec. Micro- and Nanoelectromechanical Systems, June 14, 2022.
  https://doi.org/10.3389/fmech.2022.902421

 

• U. Rawat, B. Bahr, D. Weinstein, “Analysis and Modeling of an 11.8 GHz Fin Resonant Body Transistor in a 14nm FinFET CMOS Process,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 69(4), pp. 1399-1412 (2022). https://doi.org/10.1109/TUFFC.2022.3147973

 

• A. Srivastava, B. Chatterjee, D. Weinstein, S. Sen, “A Low Phase Noise 30 GHz Oscillator Topology for Resonant-Fin-Transistors Based High-Q On-chip Resonators in 14 nm Technology,” Intl. Conference on VLSI Design (VLSID), 192-197 (2022).

 

• A. Charnas, J. Anderson, J. Zhang, Dongqi Zheng, D. Weinstein, P.D. Ye, “Record RF performance of ultra-thin Indium Oxide transistors with buried-gate structure,” MRS Device Research Conference 2022.
  Best Paper Award

 

• I. Ahmed, U. Rawat, J.-T. Chen, D. Weinstein, “GaN-on-SiC surface acoustic wave devices up to 14.3 GHz,” IEEE MEMS, Jan. 2022.
  Best Paper Finalist

 

• A. Srivastava, B. Chatterjee, U. Rawat, Y. He, D. Weinstein, S. Sen, “A mmWave oscillator design utilizing high-Q active-mode on-chip MEMS resonators for improved fundamental limits of phase noise,” Preprint: arXiv:2107.01953 [eess.SP]

 

• M.J. Storey, L. Hackett, S. DiGregorio, M. Miller, G. Peake, M. Eichenfield, D. Weinstein, “Acoustoelectric surface acoustic wave switch in an epitaxial InGaAs on lithium niobate heterostructure,” TRF Transducers, June 20-25, 2021.

 

• M. Restaino, N. Eckman, A.T. Alsharhan, A.C. Lamont, J. Anderson, D. Weinstein, A. Hall, R.D. Sochol, “In situ laser writing of 3D graphene-laden microstructures,” Advanced Material Technologies 2021, 2100222.

 

• I. Ahmed, D. Weinstein, "Switchable transducers in GaN MEMS resonator: performance comparison and analysis," Micromachines 2021, 12(4), 461. Special Issue on Nitrides and Carbides MEMS/NEMS. https://doi.org/10.3390/mi12040461

 

• J. Anderson, C. Huang, S. Peana, X. Chen, S. Ramanathan, D. Weinstein, “Perovskite Nickelate Actuators,” IEEE Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2021.3067189

 

• I. Ahmed, D. Weinstein, “Switchable transduction in GaN MEMS with off-state shunt,” IEEE MEMS, Jan. 2021.

 

• A. Srivastava, B. Chatterjee, U. Rawat, Y. He, D. Weinstein and S. Sen, "Analysis and Design Considerations for Achieving the Fundamental Limits of Phase Noise in mmWave Oscillators with On-Chip MEMS Resonator," in IEEE Transactions on Circuits and Systems II: Express Briefs 68(4), 1108-1112, doi: 10.1109/TCSII.2020.3030074.

 

• C.-L. Lo, B.A. Helfrecht, Y. He, D. Guzman, N. Onofrio, S. Zhang, D. Weinstein, A. Strachan, Z. Chen, “Opportunities and challenges of 2D materials in back-end-of-line interconnect scaling,” J. Applied Physics 128(8):080903 (2020).

 

• Y. He, D. Weinstein, “An Aluminum Nitride (AlN) based elastic metamaterial with guided negative refraction,” IEEE Int. Ultrasonics Symp., Oct. 2020. Best Paper Finalist

 

• Y. He, D. Weinstein, “Localized modes in asymmetric phononic crystals,” IEEE IFCS-ISAF 2020, July 16, 2020

 

• A. Srivastava, B. Chatterjee, Y. He, U. Rawat, D. Weinstein, S. Sen, “30 GHz low phase noise oscillator with resonant-fin transistors in 14nm technology,” GOMACTECH 2020.

 

• A. Srivastava, B. Chatterjee, Y. He, U. Rawat, D. Weinstein, S. Sen, “30 GHz mm-wave series LC oscillator topology for MEMS resonators with high static capacitance,” GOMACTECH 2020.

 

• C. Huang, Z. Zhang, S. Ramanathan, D. Weinstein, “Vertical MEMS micro-actuators with Vanadium Oxide,” presented at MRS Fall Meeting, Boston, MA, Dec 1-6, 2019, SB01.06.29.

 

• Y. He, B. Bahr, D. Weinstein, “A Tunable Ferroelectric Based Unreleased RF Resonator,” Nature Microsystems & Nanoengineering 6, 8 (2020).

 

• C. Huang, Z. Zhang, S. Ramanathan, D. Weinstein, “VO2 phase transition-based vertical MEMS microactuators,” IEEE Trans. Dev. Lett, 66(10), 4380-86 (2019).

 

• Scott T. Habermehl; Nikhil Bajaj; Shreyas Shah; D. Dane Quinn; Dana Weinstein; Jeffrey Rhoads, “Synchronization in a Network of Coupled MEMS-Colpitts Oscillators,” Nonlinear Dynamics, 98(4), 3037-3050 (2019).

 

• C.S. Pyles, N. Bajaj, J. Anderson, D.D. Quinn, D. Weinstein, J. Rhoads, “Color Sensing via a Network of Coupled Oscillators,” presented at ASME IDETC 2019, IDETC2019-98569.

 

• Y. He, B. Bahr, M. Si, P. Ye, D. Weinstein, “Switchable mechanical resonance induced by hysteretic piezoelectricity in ferroelectric capacitors,” Transducers-Eurosensors 2019, Berlin, Germany, June 23-27, 2019.

 

• U.K. Bhaskar, S.A. Bhave, D. Weinstein, “Silicon acoustoelectronics with thin film lithium niobate,” J. Phys. D: Applied Phys. 52(5), 05LT01 (2018).

 

• A. Erbes, W. Wang, D. Weinstein, A.A. Seshia, "Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators," Microsystem Technologies (2018). https://doi.org/10.1007/s00542-018-4118-5

 

• K. Ramadoss, F. Zuo, Y. Sun, Z. Zhang, J. Lin, U. Bhaskar, S. Shin, M.A. Alam, S. Guha, D. Weinstein, S. Ramanathan, "Strongly correlated proton-doped perovskite nickelate memory devices," IEEE Electr. Dev. Lett. 39(10), 1500-03 (2018).

 

• C.S. Pyles, N. Bajaj, J.F. Rhoads, D. Weinstein, D.D. Quinn, "The dynamics of large systems of globally coupled mistuned resonators," ASME Int. Design Eng. Tech. Conf. (IDETC 2018) 3rd place award in IDETC 2018 VIB

 

• Y. He, B. Bahr, D. Weinstein, "A ferroelectric capacitor (FeCAP) based unreleased resonator," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2018) Best Paper Finalist

 

• S. Shah, D. Weinstein, "Switchable bulk-acoustic-wave transducers on GaN-MMIC platform," IEEE IFCS 2018

 

• U.K. Bhaskar, M.J. Storey, S. Ghosh, S.A. Bhave, D. Weinstein, "Integration of acoustoelectric devices with IC technology using GaN/AlGaN and Lithium Niobate on Silicon heterostructures," GOMAC Tech 2018

 

• B. Bahr, Y. He, Z. Krivokapic, S. Banna, D. Weinstein, "32GHz Resonant Fin Transistors in 14nm FinFET Technology," IEEE ISSCC 2018

 

• U.K. Bhaskar, M.J. Storey, D. Weinstein, "Acoustoelectric effect with Rayleigh waves in monolithic thin film Lithium Niobate on Silicon heterostructure," IEEE MEMS 2018

 

• S. Ghosh, T. Hancock, M. Storey, L. Parameswaran, M. Geis, R. Ralston, D. Weinstein, "Nonreciprocal acoustoelectric interaction of surface waves and fluorine plasma treated AlGaN/GaN 2DEG," Transducers 2017, June 18-22, 2017, Kaohsiung, Taiwan

 

• L. D'Alessandro, B. Bahr, L. Daniel, D. Weinstein, R. Ardito, "Shape optimization of solid-air porous phononic crystal slabs with widest full 3D bandgap for in-plane acoustic waves," Journal of Computational Physics 344(1), 465-484 (2017)

 

• G. Agarwal, T. Kazior, D. Altman, T. Kenny, D. Weinstein, "Modeling and Analysis for Thermal Management in GaN HEMTs using Microfluidic Cooling," Journal of Electronic Packaging 139(1), 011001 (2016)

 

• B. Bahr, D. Weinstein, "Vertical acoustic confinement for high-Q fully-differential CMOS-RBTs," in Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2016), June 5-9, 2016, Hilton Head Island, SC.

 

• B. Bahr, L. Daniel, D. Weinstein, "Optimization of unreleased CMOS-MEMS RBTs," in IEEE Frequency Control Symposium (FCS 2016), May 9-12, 2016, New Orleans, LA.

 

• L. D'Alessandro, B. Bahr, L. Daniel, D. Weinstein, R. Ardito, "BESO approach to topology optimization of GaN phononic crystals," in ECCOMAS Congress, June 5-10, 2016, Crete Island, Greece.

 

• B. Bahr, R. Marathe, D. Weinstein, "Theory and design of phononic crystals for unreleased CMOS-MEMS Resonant Body Transistors," in IEEE J. of Microelectromechanical Systems, vol. 24, no. 5, 1520-1533, Oct 2015.

 

• S. Sundaram, D. Weinstein, "Bulk mode piezoresistive thermal oscillators: time constants and scaling," in IEEE Trans. on Ultrasonics, Ferroelectrics, and Freq Control (TUFFC), vol. 62, no. 8, 1554-1562, Aug 2015.

 

• S. Wang, L.C. Popa, D. Weinstein, "Piezoelectric nonlinearity in GaN Lamb mode resonators," International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 2015), June 2015.

 

• S. Wang, W.-C. Chen, B. Bahr, W. Fang, S.-S. Li, D. Weinstein, "Temperature Coefficient of Frequency Modeling for CMOS-MEMS Bulk Mode Composite Resonators," in IEEE Trans. on Ultrasonics, Ferroelectrics, and Freq Control (TUFFC), vol. 62, no. 6, June 2015.

 

• S. Yee, D. Weinstein, J. Fiering, D. White, Amy Duwel, "A miniature, reconfigurable polarized antenna using liquid microswitches," IEEE Wireless and Microwave Technology Conference 2015 (WAMICON'15), April 2015.

 

• N. Srinivasa, et al, "Probabilistic inference devices for unconventional processing of signals for intelligent data exploitation," in GOMAC Tech 2015, March 2015.

 

• B. Bahr, L.C. Popa, D. Weinstein, "1 GHz GaN-MMIC monolithically integrated MEMS-based oscillators," IEEE ISSCC 2015.

 

• S. Wang, L.C. Popa, D. Weinstein, "Tapered phononic crystal SAW resonator in GaN," IEEE MEMS 2015, Jan 18-22, 2015.

 

• S. Wang, L.C. Popa, D. Weinstein, "GaN MEMS resonator using a folded phononic crystal structure," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2014), pp. 72-75 (2014)

 

• L.C. Popa, D. Weinstein, "1 GHz GaN resonant body transistors with enhanced off-resonance rejection," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2014), pp. 269-72 (2014)

 

• B. Bahr, R. Marathe, D. Weinstein, "Phononic crystals for acoustic confinement in CMOS-MEMS resonators," IEEE Frequency Control Symposium (FCS 2014), 1-4 (2014).

 

• L.C. Popa, D. Weinstein, "L-Band Lamb mode resonators in Gallium Nitride MMIC technology," IEEE Frequency Control Symposium (FCS 2014), 1-4 (2014). Best Paper Award

 

• R. Marathe, B. Bahr, W. Wang, Z. Mahmood, L. Daniel, D. Weinstein, "Resonant Body Transistors in IBM's 32 nm SOI CMOS Technology," J. of Microelectromechanical Systems PP, 1(2013)

 

• L.C. Popa, D. Weinstein, "2DEG Electrodes for Piezoelectric Transduction of AlGaN/GaN MEMS Resonators," IEEE Frequency Control Symposium (FCS 2013), July 21-25, 2013.

 

• L.C. Popa, D. Weinstein, "Switchable Piezoelectric Transduction in AlGaN/GaN MEMS Resonators," International Conference On Solid-State Sensors, Actuators and Microsystems (Transducers 2013), June 16-20, 2013.

 

• W.-C. Chen, M.-H. Li, Y.-C. Liu, D. Weinstein, W. Fang, S.-S. Li, "Fully Differential CMOS-MEMS Square-Plate Oxide Resonators with Embedded Poly-Silicon Electrodes," International Conference On Solid-State Sensors, Actuators and Microsystems (Transducers 2013), June 16-20, 2013.

 

• W. Wang, D. Weinstein, "Deep Trench Capacitor Drive of a 3.3 GHz Unreleased Si MEMS Resonator," IEEE International Electron Device Meeting (IEDM 2012), Dec. 10-12, 2012, San Francisco, CA.

 

• R. Marathe, W. Wang, D. Weinstein, "Si-based unreleased hybrid MEMS-CMOS resonators in 32nm technology," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), 729-732.

 

• W. Wang, D. Weinstein, "Acoustic Bragg reflectors for Q-enhancement of unreleased MEMS resonators," IEEE Frequency Control Symposium (FCS 2011), San Francisco, CA, May 1-5, 2011.

 

• W.Wang, L.C. Popa, R. Marathe, D. Weinstein, "An unreleased mm-wave resonant body transistor," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), 1341-44.

 

• Dana Weinstein and Sunil A. Bhave, "Acoustic resonance in an Independent-Gate FinFET," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2010), pp. 459-462.

 

• Dana Weinstein and Sunil A. Bhave, "The resonant body transistor," Nano Letters 10(4) 1234-37 (2010).

 

• Dana Weinstein and Sunil A. Bhave, "Internal dielectric transduction in bulk-mode resonators," IEEE Journal of Microelectromechanical Systems (JMEMS), 18(6), 1401-1408 (2009).

 

• Lidija Sekaric, Oki Gunawan, Amlan Majumdar, Xiao Hu Liu, Dana Weinstein, and Jeffrey W. Sleight, "Size-dependent modulation of carrier mobility in top-down fabricated silicon nanowires," Applied Physics Letters, 95(2), 023113 (2009).

 

• Dana Weinstein and Sunil A. Bhave, "Frequency scaling and transducer efficiency in internal dielectrically transduced silicon bar resonators," International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), pp. 708-711.

 

• Dana Weinstein and Sunil A. Bhave, "Piezoresistive sensing of a dielectrically actuated silicon bar resonator," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2008), pp. 368-371 (2008).

 

• Dana Weinstein and Sunil A. Bhave, "Internal dielectric transduction of a 4.5 GHz silicon bar resonator," IEEE International Electron Devices Meeting (IEDM 2007), pp. 415-418. Best Student Paper

 

• Dana Weinstein and Sunil A. Bhave, "Internal dielectric transduction: optimal position and frequency scaling," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 54(12), 2696-98 (2007).

 

• Dana Weinstein, Sunil A. Bhave, Masahiro Tada, Shun Mitarai, Shinya Morita and Koichi Ikeda, "Mechanical coupling of 2D resonator arrays for MEMS filter applications," IEEE Frequency Control Symposium (FCS 2007), pp. 1362-1365.

 

• Dana Weinstein, Hengky Chandrahalim, Lih Feng Cheow and Sunil A. Bhave, "Dielectrically transduced single-ended to differential MEMS filter," IEEE International Solid-State Circuits Conference (ISSCC 2006), pp. 318-319.

 

• Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow and Sunil A. Bhave, "Channel-select micromechanical filters using high-K dielectrically transduced MEMS resonators," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), pp. 894-897.

 

• Hengky Chandrahalim, Dana Weinstein and Sunil A. Bhave, "Thickness shear mode vibrations in silicon bar resonators," IEEE International Ultrasonics Symposium (Ultrasonics 2005), pp.898-901.

 

• J. Feng, et al, "An ultra-fast x-ray streak camera for the study of magnetization dynamics," Proceedings of SPIE 5920, 592009 (2005).

 

• A. L. Cavalieri, et al, "Clocking femtosecond X-rays," Physical Review Letters 94, 114801 (2005).

 

• A. M. Lindenberg, et al, "Atomic scale visualizations of inertial dynamics," Science, 308, pp. 392-395 (2005).

 

• K. J. Gaffney, et al, "Observation of structural anisotropy and the onset of liquidlike motion during the nonthermal melting of InSb," Physical Review Letters 95, 125701 (2005).

• Wentao Wang, Dana Weinstein, "Apparatus, systems, and methods of acoustic energy confinement with phononic crystals," US Patent App. 10/084,426 (2018).
• Wentao Wang, Dana Weinstein, "Dual trench deep trench based unreleased mems resonators," US Patent App. 15/285,223 (2017).
• Wentao Wang, Dana Weinstein, “Unlreleased MEMS resonator and method for forming the same,” patent no. 9041492, May 26, 2015.
• Bichoy Bahr, Radhika Marathe, Wentao Wang, Dana Weinstein, “Acoustic bandgap structures for integration of MEMS resonators,” pub. 20150237423, filed Jan 26, 2015, patent date Jan 5, 2016.
• Andreja Erbes, Ashwin A. Seshia, Wentao Wang, Dana Weinstein, “Unreleased coupled MEMS resonators and transmission filters,” Filed Aug 5, 2014.
• Dana Weinstein, Bichoy Bahr, Wen-Chien Chen, Siping Wang, “First order temperature of frequency model for MEMS resonators and oscillators,” Filed July 22, 2014.
• Radhika Marathe, Bichoy Bahr, Dana Weinstein, “Phononic Crystals for CMOS integration of MEMS resonators,” 61/803835, Filed March 21, 2013.
• Radhika Marathe and Dana Weinstein, “Piezoelectric electromechanical devices,” 8841818, Sept 23, 2014.
• Wentao Wang and Dana Weinstein, “Unreleased MEMS resonators using acoustic Bragg reflectors,” 61/480815, Filed April 29, 2011.
• Dana Weinstein and Sunil A. Bhave, “Resonant body transistor and oscillator,” patent no. 8624337, Jan 7, 2014.
• Dana Weinstein and Sunil A. Bhave, “Dielectrically transduced single-ended to differential MEMS filter,” U.S. patent 7,436,271.

 
IEEE Spectrum - FinFET Resonators 2018
 

Nature Electronics - FinFET Resonators 2018
 

MIT Technology Review - Internal Transduction
 

CCMR Ask A Scientist - Nanobot Article