Abhijeet Paul

Interface trap density extraction in Si nfinFETs

Objective:

  • Ddirect trap density estimation in actual Si <100>/<110> n-finFETs.

Results:

  • Dit estimation in two n-finFETs .

Approach:

  • Approach: Using difference between non-ideal (expt.) and ideal (simulated)
    • Source to channel barrier height (Eb)
    • Active channel area (S).

 

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