Saumitra Mehrotra

Effect of biaxial+uniaxial compressive strain on
SiGe /Si hole bandstructure and pMOSFET

Effect of biaxial+uniaxial compressive strain on SiGe /Si hole bandstructure and pMOSFET Saumitra Raj Mehrotra & Gerhard Klimeck

Objective:

  • Understand the role of compressive strain in SiGe/Si based PMOS devices.
  • Study the performance gain achievable with biaxial+uniaxial strain.

Approach:

  • Utilized the VCA model* developed for SiGe bandstructure.

Result:

  • Linear improvement with application of uniaxial strain with no Vt shift.
  • Uniaxial strain can act as performance booster in SiGe/Si pMOSFETs.

Impact:

  • Results published in TECHCON (Austin 2010)

 

Powerpoint slide as pdf, or as image below.