Engineering nanowire n-MOSFETs at Lg < 8nm
Engineering nanowire n-MOSFETs at Lg < 8nm |
S. Mehrotra, S.G. Kim, M. Povolotskyi, T. Kubis, M. Lundstrom & G. Klimeck |
Objective:
- MOSFET scaling solutions at Lg<8 nm
Approach:
- Engineer heavy transport masses in
nanowire devices using orientation and
strain engineering.
- Full band (sp3d5d* TB model) quantum
transport simulations using OMEN.
Results:
- Heavy mass limits S-D tunneling and
improves over ON-OFF current ratio.
- Near ideal Id-Vd even at hannel
lengths, Lg=3 nm.
- Scaling solutions at Lg < 8 nm lie within
Si material.
Impact:
- Trans. Elec. Dev. (submitted.)
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