Laser Nanoimprinting Lithography
Laser Nanoimprinting Lithography
A low-cost, high-throughput benchtop method that enables thin layers of materials, including metals, semiconductor nanomembranes, and 0D-2D nano crystals, to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations.
Huang Gao, Yaowu Hu, Yi Xuan, Ji Li, Yingling Yang, Ramses V. Martinez, Chunyu Li, Jian Luo, Minghao Qi, Gary J. Cheng. "Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures". 12 Dec 2014. Science 346(6215), pp. 1352-1356. DOI: 10.1126/science.1260139
Licong An, Haoqing Jiang, Danilo de Camargo Branco, Xingtao Liu, Jin Xu, Gary J. Cheng, "Self-packaged High-resolution Liquid Metal Nano-patterns", Matter, (2022). DOI: 10.1016/j.matt.2022.01.004.
S. Jin, Z. Zhou, E. Said Attia Sakr, M. Motlag, X. Huang, L. Tong, P. Bermel, L. Ye, and G.J. Cheng, “Scalable Nanoshaping of Hierarchical Metallic Patterns with Multiplex Laser Shock Imprinting Using Soft Optical Discs”, Small, (2019), https://doi.org/10.1002/smll.201900481.
Y. Hu, Y. Xuan, X. Wang, B. Deng, M. Saei, S. Jin, J. Irudayaray, G.J. Cheng*, "Superplastic formation of Metal Nanostructure Arrays with Ultrafine Gaps", Advanced Materials, (2016).DOI: 10.1002/adma.201602497
Licong An, Haoqing Jiang, Danilo de Camargo Branco, Xingtao Liu, Jin Xu, Gary J. Cheng, "Self-packaged High-resolution Liquid Metal Nano-patterns", Matter, (2022). DOI: 10.1016/j.matt.2022.01.004.
Y. Hu, Y. Xuan, M. Qi, G.J. Cheng*, "Controlled and Stabilized Light-matter Interaction in Graphene - Plasmonic Flexible Film with Large-scale 10nm Lithography", Advanced Optical Materials, (2016) DOI: 10.1002/adom.201600201
Jing Liu, Yaowu Hu, Prashant Kumar, Xingtao Liu, Joseph MK. Irudayaraj, and Gary J. Cheng, "Enhanced energy transfer from NV Centers to 3D Graphene Heterostructures by Laser Nanoshaping", (2020), Advanced Optical Materials, 2001830. https://doi.org/10.1002/adom.202001830.
Hu, Y; Li, J; Tian, J; Xuan, Y; Deng, B; Lim DT; McNear, K; Chen, Y; Yang, C; Cheng, GJ, "Parallel nanoshaping of brittle semiconductor nanowires for strained electronics", Nano Letters, (2016).DOI: 10.1021/acs.nanolett.6b03366
J Li, YL Liao, S Suslov, GJ Cheng, “Laser shock based platform for controllable forming of Nanowires”, Nano Letters, 12 (6), pp 3224–3230, (2012) DOI: 10.1021/nl3012209, Nature Photonics, August, (2012), 6(8), “Laser nanofabrication: New regimes for nanoshaping”, Noriaki Horiuchi, Doi:10.1038/nphoton.2012.186.
S. Jin, Y.Wang, M. Motlag, S. Gao, J. Xu, Q. Nian, W. Wu, G.J. Cheng, "Large area direct laser shock imprinting of 3D biomimic hierarchical metal surface for triboelectric nanogenerator", Advanced Materials, (2017). 30(11). doi: 10.1002/adma.201705840.
Q. Nian, L. Gao, Y. Hu, B. Deng, J. Tang, G.J. Cheng, "Graphene/PbS-Quantum Dots/Graphene Sandwich Structures Enabled by Laser Shock Imprinting for High Performance Photodetectors", ACS Applied Materials & Interfaces, (2017), 9(51):44715-44723. doi: 10.1021/acsami.7b14468.
J Li, TF Chung, YP Chen, GJ Cheng, “Nanoscale Strainability of Graphene by Laser Shock Induced 3D Shaping", Nano Letters, (2012), DOI:10.1021/nl301817t.
Xingtao Liu, Licong An, Seng Xiang, Haoqing Jiang, and Gary J. Cheng, "Three-dimensional MOF Nano-architecture Membrane via Ultrafast Laser Nanoforging", Small Methods, (2021), DOI: 10.1002/smtd.202100758.