Facilities - Semiconductors - Purdue University

The Birck Nanotechnology Center at Purdue University is a multidisciplinary research facility that includes professionally staffed 25,000 square foot. Scifres Nanofabrication Laboratory cleanroom and its state-of-the-art suite of tools. Together with specialized characterization labs throughout the Birck facility, this creates an environment for the research community to design, fabricate and characterize materials and devices at the nanoscale and integrate them at the advanced system and packaging level. Birck enables collaboration among faculty, researchers, and staff engineers, and facilitates partnerships with other academic institutions, industry, and government. It serves as a platform for public and private partnerships, bringing together diverse expertise and resources to address pressing challenges in the field of nanotechnology.

The Scifres Nanofabrication Laboratory is a 25,000 sq. ft. ISO Class 3-4-5-6 (Class 1-10-100-1000) nano-fabrication cleanroom containing leading-edge equipment for epitaxy, lithography, etching, processing and packaging. The three-level structure consists of a full subfab, the cleanroom level, and an air-handling level above the cleanroom. A combination of careful control of the airflow path, multiple stages of filtration, careful choice of materials, and non-ionic-steam humidification ensure the control of both particulate and molecular contamination.