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john.a.coy.1 2012-02-13 10:44 AM
Litho Recipe for <10 micron features
I want to resolve features less than 10 microns on the mjb3_2 aligner.
Suggestions

christopher.n.deckard.1 2012-02-13 10:46 AM
Meters
I think you mean meters? :-)

ronald.k.reger.1 2012-02-13 10:57 AM
10 Micron Features
Chris,
You're right, it is meters! I don't know what's wrong with Coy!

Ron