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Ask the Staff
yuqiang.zeng.1
2014-07-09 09:04 PM
HF vapor etch system
Vapor HF etch system would make my etching process easier. But I cannot find one at Birck. Could anyone tell me if we have this system at Birck or other labs?
Thanks, Yuqiang
ronald.k.reger.1
2014-07-10 07:23 AM
HF vapor etch system
There is an HF Vapor Phase etcher in the cleanroom. It is not on Coral and is not a common-use system. However, Dr. Nithin Raghunathan, a post-doc in Prof. Peroulis' research group, can help you with this system.
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