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Ask the Staff
ruchit.mehta.1
2012-09-21 09:01 AM
Parylene deposition and etching
I have devices meant for in-vitro measurements. So, I was thinking of using parylene as a passivation layer for the metals lines. Is it possible to deposit CVD parylene at Birck and can I use any of the plasma etching systems to etch it ?
geoffrey.c.gardner.1
2012-09-21 11:48 AM
Parylene etching
Ruchit,
Parylene is commonly used for "passivation" or environmental packaging. The best/most common tool to use for etching the Parylene is the Plasmatech, with the second most popular being the Branson. Reactive oxygen is the active etchant, so where ever you can generate it should work. You may NOT use the STS ASE(no polymers), or Panasonic(no metal) Please feel free to come and chat with us if you have more questions! Thank you, Geoff |
