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Ask the Staff
sahil.m.bansal.1
2012-03-21 03:04 PM
Germanium deposition on an insulating substrate
Hello!
I am looking to deposit a thin film of Germanium on an insulating substrate like SiO2 or sapphire. I am trying to find out what are my options here at Birck. I suppose we could do e-beam evaporation of Ge in one of the e-beam systems. Maybe the CHA? What are the other options? Can we do a thermal breakdown of GeH4 like we do for SiH4 to deposit Silicon? Does anyone know if we can do a CVD growth of Germanium? Ideally I am looking for sub-100nm think Germanium films. Any help would be greatly appreciated. Sahil
timothy.j.miller.1
2012-03-22 03:43 PM
Germanium deposition
A brief meeting was held today with Sahil, Steve, Aamer, Kenny, and Tim. We came to the conclusion that Sahil should try depositing germanium on his substrate (with an adhesion layer of either chrome or titanium) in teh CHA e-beam evaporator. It was also decided to use a cap layer of silicon to prevent oxidation or nitriding of the germanium.
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