Ask the Staff

drew.h.candebat.1 2012-02-22 01:21 PM
Cleaning Glassware in Cleanroom
Dear Staff,

I like to perform a yearly clean of all my glassware and in the past have used an acidic peroxide solution (H2O2/H2SO4, 3:1). Are there more effective solutions you recommend, e.g. aqua regia? My main goal is to remove organics, residuals, and even metal leftover from lift-off. Also, is there an effective way to clean metal tweezers?

Thank you!

david.a.lubelski.1 2012-02-23 12:47 PM
Cleaning of Glassware
The standard clean of new glassware consists of the following steps:
1. Wipe down glassware with Acetone - Blow dry with N2
2. Wipe down glassware with Methanol or Isopropyl - Blow dry with N2
3. Etch in Aqua Regia - 30 min
4. Rinse in DI or Ultra-pure water 10 min
5. Etch in Piranha 15 min
6. Rinse in DI or Ultra-pure water 10 min
7. Blow dry with N2

Periodic cleaning of glass beakers and metal tweezers consists of the following steps:
1. Ultrasonic degrease in Toluene for 5 min
2. Ultrasonic degrease in Acetone for 5 min
3. Ultrasonic degrease in Isopropyl or Methanol for 5 min
4. Blow dry with N2