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Ask the Staff
leo.t.varghese.1
2012-02-15 02:07 PM
High temperature anneal at 1200 deg C
Is there anyway to have a setup to anneal CVD oxide samples annealed at 1200 deg C for 3 hrs in N2 environment?
daniel.a.hosler.1
2012-02-15 04:30 PM
Re: High temperature anneal at 1200 deg C
Hi Leo,
We've been kicking this idea around in the office with a few other staff guys, and we would like to know a little bit about your sample. That is, what previous processing has your sample been through, and what possible contaminants are on your sample? Although I don't have any furnaces capable of 1200?C for a 3 hour batch, we're trying to think of a couple of options for you. Let us know. Thanks, Dan
leo.t.varghese.1
2012-03-15 06:38 PM
Re: High temperature anneal at 1200 deg C
daniel.a.hosler.1 wrote:
Hi Leo,
We've been kicking this idea around in the office with a few other staff guys, and we would like to know a little bit about your sample. That is, what previous processing has your sample been through, and what possible contaminants are on your sample? Although I don't have any furnaces capable of 1200?C for a 3 hour batch, we're trying to think of a couple of options for you. Let us know. Thanks, Dan The sample has gone through a lot of stuff (by no means, it is ultra-clean). There is metals on it used for alignment purposes, LTO oxide deposited on it, dry etched in Panasonic etc.
The main idea is to be able to sinter the LTO oxide to convert it to thermal oxide. Best regards, Leo |
