To develop scheduling & control theories of discrete event systems such as timed Petri nets and to apply them to scheduling and control of automated manufacturing systems, especially semiconductor manufacturing equipment such as cluster tools and track systems To extend and apply modeling technologies for information system architectures for semiconductor manufacturing automation, knowledge modeling and sharing, and live, virtual, and constructive integrated simulation
People; director(s); senior researchers
SIM Lab Director: Prof. Tae-Eog Lee VM Lab Director: Prof. Byoung Kyu Choi MI Lab Director: Prof. Hayong Shin CE Lab Director: Prof. Hyo Won Suh
List of recent & current key projects
Recent projects
Efficient optimization models and algorithms for cluster tools with complex scheduling requirements Optimal scheduling of non-cyclic transient operations of semiconductor manufacturing tools with time constraints Modeling and simulation for LVC(live, virtual, and constructive)- integrated combats
Past projects
Model-based knowledge contents modeling and management for knowledge-intensive works Optimal scheduling methods of cluster tools with multi-slots, cleaning cycles, or intermediate buffers Real-time scheduler development for cluster tools
Detection