Fundamentals of MEMS - BME58100/ECE 52600
Key topics in micro-electro-mechanical systems (MEMS) and biological micro-integrated systems; properties of materials for MEMS; microelectronic process modules for design and fabrication.
Credit Hours: 3
Instructor(s): Chi Hwan Lee
Email: lee2270@purdue.edu
Office: MJIS 2086
Web: Instructor Homepage
Learning Objective: Key aim is to learn micro-electro-mechanical systems (MEMS) and micro-integrated system. Properties of useful materials will be discussed in context to MEMS and BioMEMS. Micro-electronics process modules used in the design and fabrication of MEMS and micro-integrated systems will be presented. Applications of these systems in a variety of sensors and transducers for broad ranges of implantable biomedical applications will be described. Recent advances in wearable biomedical applications of MEMS and bioMEMS will also be discussed in detail.
Topics Covered:
- Introduction to MEMS/BioMEMS (I) Introduction to MEMS/BioMEMS (II) Materials for MEMS/BioMEMS (I) Materials for MEMS/BioMEMS (II) Micro/Nano-Positioning/Manipulation (I) (HW1 Issued)
- Micro/Nano-Positioning/Manipulation (II)
- MEMS Process: Microfabrication Technology
- MEMS Process: Photolithography (HW1 Due)
- MEMS Process: Deposition and Doping I
- MEMS Process: Deposition and Doping II (HW2 Issued)
- MEMS Process: Etching
- Polymer MEMS I
- Polymer MEMS II (HW2 Due)
- Midterm
- Soft MEMS and Robotics
- Flexible MEMS I: Transfer Printing Methods
- Flexible MEMS II: Modern Transfer Printing Methods
- Wearable MEMS I: Materials and Design Layouts
- Wearable MEMS II: Fabrications and Applications
- Mechanics Design for MEMS Devices (Final Project Issued)
- Biomimetic MEMS
- Skin-mountable MEMS Devices: Basics
- Skin-mountable MEMS Devices: Clinical Implementations
- Implantable MEMS Devices: Basics
- Implantable MEMS Devices: Clinical Implementations
- Energy Harvesting for BioMEMS
- BioMEMS Case Studies I
- BioMEMS Case Studies II
Prerequisites: Sr. or Graduate standing plus consent of instructor; Calculus and Differential Eq., Fundamentals of Physics (Mechanics, Optics, Electricity and magnetism), Fundamentals of Inorganic Chemistry.
Applied / Theory: 80 / 20
Web Address: https://mycourses.purdue.edu/.
Web Content: Syllabus, grades, lecture notes, homework, solutions, chat, message board
Homework: No Homework
Projects: There won't be a final project, instead students will do 2 design micro-projects
Exams: 3 Exams, each a combination of written and MC questions
Textbooks:
- PRACTICAL MEMS: DESIGN OF MICROSYSTEMS, ACCELEROMETERS, GYROSCOPES, RF MEMS, OPTICAL MEMS, AND MICROFLUIDIC SYSTEMS BY VILLE KAAJAKARI
- MICROMACHINED TRANSDUCERS SOURCEBOOK 1ST EDITION BY GREGORY KOVACS
- FOUNDATIONS OF MEMS 2ND EDITION BY CHANG LIU
- INTRODUCTION TO BIOMEMS 1ST EDITION BY ALBERT FOLCH