Micromachining

    We are carrying out various micromachining projects using both mechanical machine tools and ultrashort pulsed lasers.

    The research topics are being carried out include:

• Mechanical Micromilling and Laser-assisted micromilling

  Various micro features can be created by mechanical micro milling with end mills ranging from 100 microns to 300 microns in diameter.

  micro walls machined using a 100 micron endmill on a stainless 316 workpiece. The walls are approximately 15 microns thick and 90 microns tall.	An array of micro holes drilled on a  steel plate

   

• Micro machining by a ultrashort pulsed laser

  The following features are machined by a pico-second laser available in the lab.   The lower left pattern is a micro channel, which was machined in about 0.5 seconds, while the lower right picture shows the holes of 180 microns drilled on molybdenum.

     

  micro accelerometer channels machined by a picosecond laser in 0.374 seconds	180 micron holes drilled on molybdenum	Ti6Al4V – Thin Frame Frame thickness: 10 microns, depth: 75 microns.	Micro via hole drilled on a  SiC/SiC ceramic matrix composite