[Leybold-list] evaporators are down
Schwartz, Kenneth F
kfschwar at purdue.edu
Mon Mar 26 09:18:53 EDT 2018
All,
The evaporation and sputtering cores are currently due to the power outage. We have condensation in the chambers and will take at least 48-72 hours before we can evaluate the damage ( if any) to the systems. We hope to have the sputtering tools back online 1st but at this time we do not know how long anything will be down
Best,
Kenny
Kenny Schwartz
Metallization/Process gases
Birck Nanotechnology Center | Room 2287B|
Office: 765.496.1174| Email: kfschwar at purdue.edu<mailto:kfschwar at purdue.edu>
Wiki: https://wiki.itap.purdue.edu/display/BNCWiki
iLabs: https://purdue.ilabsolutions.com/homepage/
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