[BNC-all] Process Considerations - Low Temperature Chiller Repair Test

[Reger, Ronald K]

All Cleanroom Users,

Per the notification below regarding the humidity test tomorrow morning, please be aware that increased humidity in the cleanroom will result in processes that will perform differently.  For example, vacuum systems may take longer to pump down due to higher moisture content in a vented chamber, and photoresist processes will have different photo speeds due to moisture content.  Please be aware of these potential issues and avoid processes that may be negatively impacted by this test tomorrow morning.  The facilities staff will monitor the humidity rise until it reaches steady-state, and then return the cleanroom to humidity control to bring it back to the nominal 45 - 50% level.  This test is being done to see where humidity levels stabilize in order to predict what will happen when the low-temperature chiller is taken off-line for its repair later in the summer.



From: BNC-all [mailto:bnc-all-bounces at ecn.purdue.edu] On Behalf Of Anthrop, Heather L
Sent: Monday, June 29, 2015 9:49 AM
To: 'bnc-all at ecn.purdue.edu'
Subject: [BNC-all] First Notification - Low Temperature Chiller Repair


All,

In order to get a feel for how the upcoming chiller shutdown will have on cleanroom humidity, we plan to command the low temperature control valves off to the cleanroom makeup air units tomorrow morning. The test will begin at 7:30 AM and last until 11:30 AM. Please let me know if you think this will create a problem for your processes. We will leave the low temperature coils active for the laboratory makeup air handlers, so lab humidity will be unaffected by tomorrow's test.

I am awaiting a reply from Carrier as to when they can begin work. As soon as I have that information, I will communicate it to you.

Regards,

Jeff Kuhn
Facility Engineer
Birck Nanotechnology Center
Purdue University
1205 W. State St.
West Lafayette, IN 47907
Ph:  (765) 496-8329
Fax: (765) 496-2018

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