[BNC-all] Cleanroom Humidity Change on Friday

John Weaver jrweaver at ecn.purdue.edu
Thu Nov 8 14:37:26 EST 2007


Please note that the cleanroom humidity will be out of specified limits on
Friday during the ultrapure water outage.  This can impact various
operations, but can have a very pronounced affect on photo-speed in
lithography operations utilizing POSITIVE PHOTORESIST.  

 

Thank you again for your patience and cooperation,

 

John Weaver

 

John R. Weaver

Facility Manager

Birck Nanotechnology Center

Purdue University

(765) 494-5494

jrweaver at purdue.edu

 

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