[BNC-all] Cleanroom Humidity Change on Friday
John Weaver
jrweaver at ecn.purdue.edu
Thu Nov 8 14:37:26 EST 2007
Please note that the cleanroom humidity will be out of specified limits on
Friday during the ultrapure water outage. This can impact various
operations, but can have a very pronounced affect on photo-speed in
lithography operations utilizing POSITIVE PHOTORESIST.
Thank you again for your patience and cooperation,
John Weaver
John R. Weaver
Facility Manager
Birck Nanotechnology Center
Purdue University
(765) 494-5494
jrweaver at purdue.edu
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