%PDF-1.3
%
9 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
20 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
5 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
10 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
19 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
14 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
7 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
27 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
6 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
21 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
16 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
3 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 139>>stream
x1 D{Nh^@.|@Ofnyva'uDCz}EP"7c-
sF+_yȉS.K9!/jF$ϕgW)FYpI~Ts-7ê?1
endstream
endobj
24 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
29 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
1 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 124>>stream
xͱ
0F>?M6""7N]MA
k3~g+Td$R@UQ523!=Nl]w<\gp57hڵi٠ϜA NԿ a
endstream
endobj
26 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
8 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
28 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
17 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
15 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
11 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
22 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
18 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
25 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
13 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
12 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
4 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 47>>stream
xs
w3TPI2T0 BCcc=s3C#\.
͐,.. d
endstream
endobj
23 0 obj
<>>>/BBox[0 0 607.52 800.45]/Length 46>>stream
xs
w3TPI2T0 BCcc=s3c\.
͐,..
endstream
endobj
31 0 obj
<>stream
ASAP10.1021/acsphotonics.0c00960
VoR
endstream
endobj
32 0 obj
<>stream
x+ |
endstream
endobj
33 0 obj
<>stream
xS**T0T0 BiU" n
endstream
endobj
34 0 obj
<>stream
x+ |
endstream
endobj
35 0 obj
<>stream
xS**T0T0 Bih]"
[
endstream
endobj
36 0 obj
<>stream
x+ |
endstream
endobj
37 0 obj
<>stream
xS**T0T0 Bih]"
c
endstream
endobj
38 0 obj
<>stream
x+ |
endstream
endobj
39 0 obj
<>stream
xS**T0T0 Bid]"
e
endstream
endobj
40 0 obj
<>stream
x+ |
endstream
endobj
41 0 obj
<>stream
xS**T0T0 Bid]"
a
endstream
endobj
42 0 obj
<>stream
x+ |
endstream
endobj
43 0 obj
<>stream
xS**T0T0 Bid]" '
]
endstream
endobj
44 0 obj
<>stream
x+ |
endstream
endobj
45 0 obj
<>stream
xS**T0T0 Bih]"
W
endstream
endobj
46 0 obj
<>stream
x+ |
endstream
endobj
47 0 obj
<>stream
xS**T0T0 Bid]"
Y
endstream
endobj
48 0 obj
<>stream
x+ |
endstream
endobj
49 0 obj
<>stream
xS**T0T0 BiUn)cT h
endstream
endobj
50 0 obj
<>stream
x+ |
endstream
endobj
51 0 obj
<>stream
xS**T0T0 Bih]" S
_
endstream
endobj
52 0 obj
<>stream
x+ |
endstream
endobj
53 0 obj
<>stream
xS**T0T0 BiU"
endstream
endobj
54 0 obj
<>stream
x+ |
endstream
endobj
55 0 obj
<>stream
xS**T0T0 BiU"
endstream
endobj
56 0 obj
<>stream
x+ |
endstream
endobj
57 0 obj
<>stream
xS**T0T0 Bih]"
g
endstream
endobj
58 0 obj
<>
endobj
83 0 obj
<>stream
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