%PDF-1.6
%
107 0 obj
<>>>
endobj
193 0 obj
<>stream
application/pdf
FREQUENCY SCALING AND TRANSDUCER EFFICIENCY IN INTERNAL DIELECTRICALLY TRANSDUCED SILICON BAR RESONATORS
D. Weinstein, S.A. Bhave, S. Morita, S. Mitarai, K. Ikeda
2009-03-18T17:01:07-04:00
PScript5.dll Version 5.2
2009-05-06T15:29:25-05:00
2009-05-06T15:29:25-05:00
Acrobat Distiller 8.1.0 (Windows)
uuid:82438c46-366a-43a9-8e51-10945809f91e
uuid:86d47c83-b2ef-4354-82a9-70d591efdeca
endstream
endobj
108 0 obj
<<>>
endobj
217 0 obj
<>
endobj
218 0 obj
<>
endobj
99 0 obj
<>
endobj
101 0 obj
<>
endobj
103 0 obj
<>
endobj
104 0 obj
<>stream
H]s6+4\Eɲ@wB̐l Mv[NHfg:B:t+=/Igc-i"BWǭ|kGd~v{>EOZoYμ͐%
S̃آ&!jA2w49c6|Y@㏆d7:$ hdsNd)B~P~
Ϟ>}p9
'%y@ɶrB0 4\Yu>=w?6Jkj}-F1^
t(eIhGK,q"4Wd1zY.$r3p4sAi͠D{.B{F}{v:ӱr9_1YK] |j1CS,uc
8>DbmvY!qdAeP-l,:/^݈j^=U/YvJnSX^5Ĕ_ҪFZsa<9tmxxEdEL3(؍~.C&ֵ.gfy*S8$A}&(N'r-u#Kz\>>oxYZ%~9ےCo)@
_gye3q~T(*bFٻk$\EV䔩7s]lVww%k7VƄgT3Y&˧*b<^vTb]=ww{ʆ{{{?{ƞƞƞƞƞ=-k&7/Ğ1]=w)jii?(6gv44ƼEz{҈zzo^3齨2ݦS-/5.7}Oܻ ˩Tj $
endstream
endobj
109 0 obj
<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI/ImageB]/XObject<>>>/Rotate 0/Thumb 168 0 R/Type/Page>>
endobj
1 0 obj
<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageB/ImageI]/XObject<>>>/Rotate 0/Thumb 169 0 R/Type/Page>>
endobj
11 0 obj
<>/Font<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI]/XObject<>>>/Rotate 0/Thumb 170 0 R/Type/Page>>
endobj
61 0 obj
<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI/ImageB]/XObject<>>>/Rotate 0/Thumb 171 0 R/Type/Page>>
endobj
62 0 obj
[63 0 R 64 0 R 65 0 R 66 0 R 67 0 R 68 0 R]
endobj
171 0 obj
<>stream
8;Z\7gQBB5$r]CWL]+G!p7lek!3(`j3SBu#\XQ_Jff3<-joYa[hZ)0aqVSDUlebq;
Ybbt%jo,"^DpsIr>V=tV%:;>*'mIP\Hs6G_4Hi:[:,.W+N'=r"
[s.F\p#.U]mWV=l1LIll'Lm$H>`e__'8.b>baX9(I(e[EhW)M_=BM:HQ%f:$&*#/M
+1?QcU@35lYqQf'QsK$ZnlHkS9T?:Ea[[?d3Tpao`Q]U3*`[l+G0>;u[63I+oi6GA
!1G3MaI*;9NW>3fX&nSu(Y@a2"-@b8.?'"6nOZgg1%riddEKg)j_eTX1H=iJ9E&NY
h'MIk"n4!HnSf$&%nHsE_X>Ekgmm9a]5J\jGp;,LaDuu[VX5VBk25j4r,eRm=Zu8m
r?]D@ou'q>oH?#'J'a-o!;FB#j0.g2foJ?R[="paq"d.kS7-hcE!O=3BfuH=N(c%\
q=U:4X,9bs!`IVpiZDP4MnVL:!Y1MjL$RU]39#9Md!]i5dIBa+qRjUCdF4*3_'(iV
-N[Uu^Of=RTFPWKe<(k_gd"];0u/hCCH)o59('L&m9toP0'q>'G4G[U_7F=B7d6=o
=5asaJJV[GZs!#b+OM"01PJj8+&-VtZa\Gj;6qT@/th4k)Ggk+Y9ts0UBeZnU7l5]
Am#>kCq7"p@n8$DO9$Tr-^+2Hd(6B-f(jnreW5sG-_L4`f8n)c7n=ALc5-`L(M[7KPn:NDRUklo0W,
hU+7,7qs#r)')Z)6nueCX,R(bPiqO.5P'Qc@$,SNn2SM%cS7jYm3KK=?,)pcDQh,9
+Iq.rKd?BZ
_bt:L:b-NaW\!2J(-!pl5`6-QC2Ck"ddqVXN.WVq-F.]n`+s1,Rg+0nr\7hY8s"m,
E"ZQf3]>9N%b680;pu+Lbjllc:'A(.[K=H,P`=
bn0aY=fG9Op<8tbd8pe$D(N/fA;4'cna^LuCVFC5oC;S<\Ykgj]M-"Q7b#?NmHV)l
I9A"eTq*LRELN_'_:`&,;N-OJQn"La,?Q2Xnbe*,2cH7#KP/KRr6S+#Go9HA"QU%\
pk.Q8X[?\c"@-15($YYQ6Y!I=5b5u7X;jh;,(APN/XBZkf,S$FT@ZsW%U*]hUARJ/
fA,P\K@ilq0K50lOI!D3X%p0/D'BRtkT(=218\l,i?"aPRS^#Z3hsTppq$2%&T4B"
a!N$A>]-6)N9P'-Oq4!%HEkEj.OC%Z%6;:e'r36p1#U]GZ:mqsUHm5]hJ/,gjCkt^
U,Ib/'r+Kfp0/u,61UjFR:\pir+\n`,hQT[].Y<>)#M$[-+Sq-7OV9(YHPR+QHY&M
Qo.aL0)(1[PgjMf"8]TF#&d(Q=+'bgoD*!Vb-NCX1GF]A4Mi(IU6)?h;%0TI=`WDD
XR975DY(KD?-jQ?n6Nf)mVi'++09Yuq7$>Jl^n1XH/Y@'~>
endstream
endobj
172 0 obj
[/Indexed/DeviceRGB 255 173 0 R]
endobj
173 0 obj
<>stream
8;X]O>EqN@%''O_@%e@?J;%+8(9e>X=MR6S?i^YgA3=].HDXF.R$lIL@"pJ+EP(%0
b]6ajmNZn*!='OQZeQ^Y*,=]?C.B+\Ulg9dhD*"iC[;*=3`oP1[!S^)?1)IZ4dup`
E1r!/,*0[*9.aFIR2&b-C#soRZ7Dl%MLY\.?d>Mn
6%Q2oYfNRF$$+ON<+]RUJmC0InDZ4OTs0S!saG>GGKUlQ*Q?45:CI&4J'_2j$XKrcYp0n+Xl_nU*O(
l[$6Nn+Z_Nq0]s7hs]`XX1nZ8&94a\~>
endstream
endobj
75 0 obj
<>stream
ho*?b/mf˸70-nmwmFI/C̿}q1ƀ9_IqNbm,RU;ozZ]~`+x=fZI g`E,/XUpF,?]舮Y
SU8;R͟?u4 GubI+=X
#GWBnLJ[%K>m,g UK2C$A"ݐՈfp2Z"w.SlݴtnJְ'pt˟YeJ0YԜfsPp.B{/kvI/|!
mZD9nA ٙڝtzK (>i(h~۾
?POBLpON=T@W |]PU#o)?)$a隤RVЃ
G^E˱jJuK.00Y芔U*f#w%"풱 /WJ`)Q#rt(ITIʮB5SQ5㉐EV Ց_sDpQX$>X֢ n l/uޢdWp& -$>
@ uTjJP^^ !8^@'4Ӓ/" (P
\ p$'7 @ 7 p@@ @ 4%p
L%oH4&I|Q0ԟSsa('f&vׅjd)0o^l{s+]c$fy.X]JDύDWdIR +SF .`Ф@v&Wz.w3B7[fOSg&:T~9^
$Hʬ8IQZtR%TiT,飰IВ@.kFyWޫek \ @e.@ dG"@p2\u@ :P+A;KԘ+'l}@Ւ/GA_@ +|)p ܢ?!K
p-% ^כZJn>
@7)p$eH8\|+8Vv+9#Q,!-
|]p ItYsѭ`wZm l_E.hE _fx |!\ISHTYC)u3"# +MTI٢,hGԚ r#AR-yWNUvZSyn1.5ێ&A)ulK rѱyȼhZܫ
Zǣ3D vJ7eY%0i}]&/A12nY=$s9Ou.Bׂ\zoF|.p
^ho&{-UoO -7 n@[2P5Y o dUWVP@W@.ЋЙ@[Qp`5ЙP?!.B/]A;{@ZСq@B A =O(]ʻV5DDgK6Q.X@K@Tk-*W-AՂu$vm!DF.U mk*7j7Ӎ@TEz,,֥,xVSP)k5oі[ *- қ㹵-d7v&վ=csrĪ%7E)mM0kNrӧA9).u(";ΉAr!S5+ZaI>Pnf- ޣ9
dxafy^jR@\-AxV^AenѨ@ kc Dl)k<>5)p7mm~]1XP^>]7hEPz/mVD:A<'5C m^2O;3=btG}G F/6ͩ{$pF=&T_l>
-+T,pMdU#$l2A)p랓?'u粠PCZv8x՛n[A<d{q#M^R\
RwfDGG=tn']_qK22\@WM-[)$ 'شp.JatamdIMe{ԒͬBk?gįƺ/
"OvC{=ŎnD`>,P9n8 tvU Jo4!Q@ AM ?l _T hBS@ @ @ @
ʿ|ܕ/tzK (?y+' tRQL0''?~FݨD\gjMͷh!B
&qK+9A-zve`-R͟?ͩ:ɂ[WJ#vۛ.=- =0Ln4#܈sMnSS0.DNkyz6D2iyT@W6=N'_
rN28_skj\g]<]ea-؍4']F4aFb]LpO`
EGz ?W4_@ @ @ @ @ @ @ @ P+A;tzK WsG
sOD ؑyno]\PE֩2Bho=U鬑ȜMU
@ߒ̥x?9nFIad $%GȂ@9nw 迠? F;"gv;1&Hr3/" )r 禵nK^nI b+@BBBBj--,[fNdLիÞwJ_n}e,'w rW<=wT9Q)S~sGMy/Sl`
6b8))>4U2f;GM=]fb~VQ;Cq`
rd
'^_#:O:4jnr^.qNVsMJSurfG)%:/uQ%y^_]d]O$L:?f%Ϊd@LPd=vɇL2I|Wɴ%gn][(DziwI&RS)TKSw
3uKT|7T#tL=d[kd2#jܴ)bSU#¶Kw2IZ<``G,P彉O>fCݙ(2E(U,(4LPTh_Zwg