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Fundamental of BioMEMS and Micro-Integrated Systems

ECE52600

Credit Hours:

3

Start Date:

January 19, 2021

Learning Objective:

Description:

Key topics in biomedical micro-electro-mechanical systems (Bio-MEMS) and micro-integrated systems are covered. Biological concepts related to the BioMEMS are reviewed. Silicon process modules and soft-lithography processes used in the design and fabrication of BioMEMS and micro-integrated systems are presented. Applications of these systems in a variety of sensors and transducers are described. Recent advances in BioMEMS, Lab-on-a-Chip, and related advanced topics are discussed.

Topics Covered:

Prerequisites:

Applied / Theory:

50 / 50

Textbooks:

Micromachined Transducers Sourcebook, G. Kovacs, McGraw Hill, 1998, ISBN No. 0-07-290722-3.

Computer Requirements:

ProEd Minimum Requirements:

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Tuition & Fees:

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