@article{1574usman2016, author = "Muhammad Usman and Juanita​ Bocquel and Joe Salfi and Benoit Voisin and Archana Tankasala and Rajib Rahman and Michelle Simmons and Sven Rogge and Lloyd Hollenberg", title = "Spatial Metrology of Dopants in Silicon with Exact Lattice Site Precision", year = "2016", note = "Nature Nanotechnology 11, 763–768 (2016);doi:10.1038/nnano.2016.83", url = "http://arxiv.org/abs/1601.02326", }