%0 Generic %D 2014 %T A metrology technique for phosphorus-donor clusters in silicon based on hyperfine splittings %A Wang, Yu %A Buch, Holger %A Hollenberg, Lloyd %A Klimeck, Gerhard %A Simmons, Michelle %A Rahman, Rajib %Z Poster Session, APS march meeting, Denver CO, March 3-7, 2014