@article{1416wang2014, author = "Yu Wang and Holger Buch and Lloyd Hollenberg and Gerhard Klimeck and Michelle Simmons and Rajib Rahman", title = "A metrology technique for phosphorus-donor clusters in silicon based on hyperfine splittings", year = "2014", note = "Poster Session, APS march meeting, Denver CO, March 3-7, 2014", }