%0 Journal Article %D 2016 %T Spatial Metrology of Dopants in Silicon with Exact Lattice Site Precision %A Usman, Muhammad %A Bocquel, Juanita​ %A Salfi, Joe %A Voisin, Benoit %A Tankasala, Archana %A Rahman, Rajib %A Simmons, Michelle %A Rogge, Sven %A Hollenberg, Lloyd %Z Nature Nanotechnology 11, 763–768 (2016);doi:10.1038/nnano.2016.83