Mechanics of MEMS and NEMS


Credit Hours:


Learning Objective:

This course will detail the modeling, analysis, and predictive design of micro- and nanoelectromechanical systems (MEMS and NEMS).


Particular emphasis will be placed on the development, and subsequent analysis, of "first-principles", multi-physics models capable of accurately predicting the behavior of micro/nanoscale devices and ultimately enabling design.

Topics Covered:

Introduction/Scaling; Modeling Elastic Structures: Beams, Membranes, and Plates; Modeling Resonators; Modeling Multi-Degree-of-Freedom Systems; Electrostatic Transduction: Parallel Plate Systems and Comb Drives; Piezoelectric/Piezoresistive Transduction; Magnetic/Electromagnetic Transduction; Thermal/Electrothermal Transduction; Near-Field Interactions; Dissipation: Fluid Effects, Material and Other Effects; Nonlinearity, Noise and Uncertainty in MEMS/NEMS; Static and Quasi-static Systems: Pressure Sensors, Mass Sensors; Dynamic Systems: Switches, Accelerometers, Gyroscopes; Resonant Systems: Mass Sensors, Signal Filters.


ME 274: Basic Mechanics II, ECE 201: Linear Circuit Analysis I, and ME 375: System Modeling and Analysis; or equivalent courses.

Applied / Theory:

40 / 60

Web Address:


Approx. 5 assignments.


Required. Students will work on one extended project over the course of the semester. Includes a 1 page abstract, 3-page project update, final report and 12 min overview.


None. See Homework and Project.


*Tentative-check the Office of the Registrar Textbooks for the official list*J. F. Rhoads, Mechanics of MEMS and NEMS Lecture book. 2011, West Lafayette, IN. [Available Online]

Computer Requirements:

ProEd Minimum Computer Requirements.

ProEd Minimum Requirements:


Tuition & Fees: