ME59700 - Mechanics of MEMS and NEMSSpring 2017
Days/Time: TBA / TBA
Credit Hours: 3
This course will detail the modeling, analysis, and predictive design of micro- and nanoelectromechanical systems (MEMS and NEMS).
Particular emphasis will be placed on the development, and subsequent analysis, of "first-principles", multi-physics models capable of accurately predicting the behavior of micro/nanoscale devices and ultimately enabling design.
Introduction/Scaling; Modeling Elastic Structures: Beams, Membranes, and Plates; Modeling Resonators; Modeling Multi-Degree-of-Freedom Systems; Electrostatic Transduction: Parallel Plate Systems and Comb Drives; Piezoelectric/Piezoresistive Transduction; Magnetic/Electromagnetic Transduction; Thermal/Electrothermal Transduction; Near-Field Interactions; Dissipation: Fluid Effects, Material and Other Effects; Nonlinearity, Noise and Uncertainty in MEMS/NEMS; Static and Quasi-static Systems: Pressure Sensors, Mass Sensors; Dynamic Systems: Switches, Accelerometers, Gyroscopes; Resonant Systems: Mass Sensors, Signal Filters.
ME 274: Basic Mechanics II, ECE 201: Linear Circuit Analysis I, and ME 375: System Modeling and Analysis; or equivalent courses.
Approx. 5 assignments.
Required. Students will work on one extended project over the course of the semester. Includes a 1 page abstract, 3-page project update, final report and 12 min overview.
None. See Homework and Project.
*Tentative-check the Office of the Registrar Textbooks for the official list*J. F. Rhoads, Mechanics of MEMS and NEMS Lecture book. 2011, West Lafayette, IN. [Available Online]
ProEd Minimum Computer Requirements.
ProEd Minimum Requirements: view
Tuition & Fees: view