JEOL Scanning Electron Microscope
(JSM-6400 SEM)


  • Secondary Electron Imaging
  • Backscattered Electron Imaging
  • EDS (with ultra thin window)
  • Sample exchange chamber for up to 4in (100mm) wafers


  • ARMS B205


  • MSE 597 Scanning Electron Microscopy is a prerequisite for all student users (formerly known as MSE 581).
  • Training: a runthrough followed by a driving test for those who have passed MSE 597 on another instrument.



Equipment reservations: Coral
Tutorial Information for the JEOL 6400 provided by Michigan Technological University  JEOL 6400 Tutorial
Mail List (6400 Mail List)  [You will be sent email requesting confirmation, to prevent others from gratuitously subscribing you. This is a private list, which means that the list of members is not available to non-members.]
Other Microscopes


School of Materials Engineering
Electron Microscopy Facilities