Deposition Processing of Thin Films and Coatings
Sem. 1. Class 3, cr. 3. (offered in alternate years). Prerequisite: senior or graduate standing in engineering or science.
MSE 548 is an elective course.
Weekly Schedule: Three 50-minute lectures.
Processing and microstructural development of thin films and layered structures. Includes vapor, liquid, and reactive processing, as well as layer modification by annealing and beam techniques. Offered in alternate years.
Relation of Course to Program Outcomes
(a) an ability to apply knowledge of mathematics, science, and engineering
(e) an ability to identify, formulate, and solve engineering problems
(g) an ability to communicate effectively
Students should be familiar with all major inorganic film deposition processes.
Students should be able to predict the most likely microstructure(s) developed by any of these processes, and be aware of how that microstructure could be assessed.
• List the detailed sequence of steps required for CVD (or sputter or MBE) film deposition, and quantify the parametric dependence of these steps.
• Explain the process and film requirements for an epitaxial (or columnar or amorphous) film.
• Discuss the differences between different evaporation processes.
• Compare the advantages and disadvantages of techniques used to suppress reactivity (a) of the materials during deposition and (b) of the material with the substrate.
• Explain the importance of materials and process parameters during laser annealing.
• List material and process critical factors for specific films in at least three different functional classes of film applications.
• Communicate in detail the importance, use, and production method of a particular functional film in a manner understandable by other students.
• Explain the importance and critical issues involved in the following film deposition processes: CVD, PVD, Electrochemical, thermal spray, lithography.
• Explain the broad issues involved in processing each different type of material class: metals, ceramics, polymers, semiconductors, composites, and functionally graded materials.
Tim Sands and Eric Kvam
Contribution of course to meeting the professional component:MSE 548 is a materials-specific technical elective course.
Prepared by: Elliott Slamovich
Date: April 25th, 2007