ME 363: Principles and Practice of Manufacturing Processes
This undergraduate course is designed by Prof. Shin to give seniors in mechanical engineering a basis understanding of manu-facturing processes which require deformation and joining as their basic mechanism to change the shape of the product. Starting from Fall semester, 2004, new topics of microfabrication were added into the course. Two laboratories of soft lithography were offered to help student understand and practice small-scale manufacturing. These two laboratories will be performed in MMC with the guide of the lab supervisor.
Semester: Fall, 2008
Instructor: Professor Shin (shin@ecn.purdue.edu)
MMC Lab Supuervisor: Hongtao Ding (dingh@purdue.edu)
Two soft lithography lab modules have been developed for the course. Each lab will last 3 hours for each group.
The first lab module includes:
(a) Design/modify a pattern on the PC-based design station using ProE and AutoCAD,
(b) Print the pattern onto transparencies and Photograph the patterns with a standard 35mm camera,
(c) Develop the film and use it as the mask.
Lab module download: Soft Lithography part I - Lab 9
The second lab module includes:
(a) Spin coat SU-8 photoresist onto silicon wafer,
(b) Bake the photoresist,
(c) Align wafer with mask and expose for prescribed time,
(d) Develop photoresist,
(e) Hardbake pattern (master),
(f) Pour PDMS onto master,
(g) Release PDMS from master and bond to standard glass slide,
(h) Evaluate PDMS pattern with optical microscope and atomic force microscope (AFM).
Lab module download: Soft Lithography part II - Lab 10
Lecture 1: Introduction of Microfabrication
Mask patterns download
1. Purdue Logo
4. Maze 2: Impoffible_waffle [more..]
Please email dingh@purdue.edu for further questions about the lab.