Microfabrication
ME 363: Principles and Practice of Manufacturing Processes
This undergraduate course is designed by Prof. Shin to give undergraduates in mechanical engineering a basic understanding of manufacturing processes which require deformation and joining as their basic mechanism to change the shape of the product. Starting from Fall semester, 2004, new topics of microfabrication were added into the course. Two laboratories of soft lithography are offered to help student understand and practice small-scale manufacturing. These two laboratories will be performed in Potter333 with the guide of the lab supervisor and TA.
Semester: Fall, 2022
Instructor: Professor Shin (shin@purdue.edu)
MMC Lab Supuervisor: Kyle Baer
Two soft lithography lab modules have been developed for the course. Each lab will last 3 hours for each group.
The first lab module includes:
(a) Design/modify a pattern on the PC-based design station using ProE and AutoCAD,
(b) Print the pattern onto transparencies and Photograph the patterns with a standard 35mm camera,
(c) Develop the film and use it as the mask.
Lab module download: Soft Lithography part I - Lab 9
The second lab module includes:
(a) Spin coat SU-8 photoresist onto silicon wafer,
(b) Bake the photoresist,
(c) Align wafer with mask and expose for prescribed time,
(d) Develop photoresist,
(e) Hardbake pattern (master),
(f) Pour PDMS onto master,
(g) Release PDMS from master and bond to standard glass slide,
(h) Evaluate PDMS pattern with optical microscope and atomic force microscope (AFM).
Lab module download: Soft Lithography part II - Lab 10
Lecture 1: Introduction of Microfabrication
Lecture 2: Soft Lithography
Lecture 3: Labs Introduction
Example mask patterns. You must create your own pattern different from these following patters.
3. Maze 2: Impoffible_waffle [more..]
For any further questions, please contact your TA.
