[Leybold-list] Leybold and CHA are both down

[Schwartz, Kenneth F]

All,
  We are replacing the roughing pumps on both the CHA and Leybold with new dry scroll pumps.  This change will decrease down time and contamination from oil back streaming form the current hydrocarbon pumps now in use. We plan on having both tools back on line the 1st of next week . Please watch ilabs and the wiki for updates and status

           Best,
               Kenny


Kenny Schwartz
Metallization/Process gases
Birck Nanotechnology Center | Room 2287B|
Office:  765.496.1174| Email: kfschwar at purdue.edu<mailto:kfschwar at purdue.edu>
Wiki:  https://wiki.itap.purdue.edu/display/BNCWiki
iLabs:  https://purdue.ilabsolutions.com/homepage/
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