[Leybold-list] System back online

[Lubelski, David A]

The Leybold is back online.  All internal components have been cleaned/replaced.  We are still having some issues with the power supply dropping from 8KV to 2KV during deposition of SiO2 and Al2O3.  The beam is staying in the crucible so no contamination will occur. I have aa call into Telemark about the power supply and what can be done.  I was assured that it would be ok to use until they figure out a solution.
I am increasing the use time to 5 hours from the current 4hrs to allow more pumpdown time.
Dave

Dave Lubelski
Research Engineer
Birck Nanotechnology Center
Purdue University
(765)494-9102
lubelski at purdue.edu

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